Vertical magnetism anisotropic film
An anisotropic and anisotropic field technology, applied in the application of magnetic film to substrate, magnetic layer, etc., can solve problems such as difficult to flip, high coercive force, unsuitable, etc., to meet ultra-high sensitivity and storage The effect of adjustable density and coercive force
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[0007] According to the above film composition, the following 12 kinds of Tb were prepared by magnetron co-sputtering x (Co 2 FeZ) y thin film, which is characterized in that the Z position can be Al, Si and other elements, Co 2 FeZ is a semimetallic Heusler alloy component.
[0008]
[0009] As shown in the table above, the above Tb x (Co 2 FeZ) y The films all exhibit perpendicular magnetic anisotropy, the perpendicular magnetic anisotropy field is between 5000Oe and 11000Oe, and the coercive force decreases with the decrease of Tb and Fe atomic ratio x:y. Sampling tests show that the film still maintains perpendicular magnetic anisotropy after annealing at 300°C.
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