Electron beam heating evaporation method as well as device and uses thereof

Abstract

The invention relates to a heating and evaporating method of a novel electron beam provided with powdered material with comparatively high melting point and a device thereof. The method combines an electron beam heating evaporating method and a resistance heating evaporating method to provide a filamentose cathode with a negative bias by a high voltage dc power, thus a highfield is formed between the negative bias and an earthing crucible; furthermore, a filamentose hot cathode is provided with an adjustable working current by a low voltage ac power to lead an electron beam current to be emitted by the filamentose hot cathode; the electron beam current bombards and heats the crucible at a high speed under the action of a strong electric field. An electrochromic layer tungsten trioxide WO3 film and an electrolyte layer lithium fluoride LiF film applied to electrochromic equipment can be prepared by using the electron beam heating and evaporating method of the invention; the film material prepared is dense and the charge transport performance is excellent; the film thickness can be precisely controlled when the method is applied to the evaporating preparation of polyimide substrate flexible film and solar cell nickel barrier film, and the device is characterized by simple operation.

Description

technical field [0001] The invention relates to the field of vacuum coating / deposition materials, in particular to an electron beam heating evaporation method, device and application for evaporating powdery materials with a relatively high melting point and capable of precisely controlling the evaporation rate and film thickness. Background technique [0002] The thermal evaporation devices of the existing vacuum coating / deposition equipment mainly include resistance thermal evaporation and electron beam heating evaporation. Among them, the resistive evaporation device uses a low-voltage high-current power supply to directly drive the electrothermal conversion device, and the electrothermal conversion device mainly includes two kinds of boat evaporator and resistance wire. The boat evaporator is made of high melting point metals such as tungsten and molybdenum by stamping or other mechanical processing methods to make boat evaporators of various shapes. The resistance of th...

AI Technical Summary

Problems solved by technology

However, electron beam evaporation requires a strong magnetic field, a high-precision electron gun and a high-power DC high-voltage power supply. The equipment investment cost is high, the power supply control system is sophisticated and complex, and the operation technology is also high.

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