Variable focal length X-ray compound lens and manufacturing method thereof

A technology for combining lenses and a manufacturing method, applied in the optical field, can solve the problems of increased scattering, complex process, low machining accuracy, etc., and achieve the effects of high structure height and aspect ratio, low surface roughness, and high machining accuracy

Inactive Publication Date: 2008-02-06
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

Since this combination lens uses Al material with low price and adopts molding technology to obtain the parabolic shape, it has the following disadvantages: low processing accuracy, which affects the focusing effect; the distance between two adjacent air cavities is large, which ...

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  • Variable focal length X-ray compound lens and manufacturing method thereof
  • Variable focal length X-ray compound lens and manufacturing method thereof

Examples

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Embodiment Construction

[0054] As shown in FIG. 1 , the combined X-ray zoom lens of the present invention includes a lens body 1 and air cavities 2 arranged at intervals on the lens body 1 . The gap between adjacent air cavities 2 forms a concave lens, that is, the lens unit 3 . All lens units 3 together constitute a lens group.

[0055] As shown in Figure 2, the further improved structure of the X-ray zoom combination lens of the present invention is: a row of air cavities 2 are engraved on the lens main body 1, and there is a certain gap between adjacent air cavities 2, and all the air cavities 2 are double parabolic cylinders The structure, its cross section is a figure composed of a pair of opposite parabolas, or the single parabolic cylinder structure, its cross section is a parabola, or the elliptic cylindrical structure, its cross section is an ellipse, or any other geometric shape structure that can realize focusing. In this way, the adjacent air cavities 2 together with the gaps between the...

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Abstract

The present invention belongs to the field of the optical technology and relates to a varifocal X-ray combination lens and its manufacture method. This combination lens consists of a lens main body and air cavities arranged on the lens main body at intervals; the material of the lens main body is PMMA. The manufacture method of the present invention is firstly making in turn the required lays of polyimide, metal film, optical resist, etc. on the surface of the monocrystal line silicon chip which plays the role of support; secondly performing the processes of photoetching, electroforming, removing of photoresist, windowing, and so on, then completing the preparation of the photomask used in photoetching the lens main body and the photomask used in photoetching the air cavities; Finally, performing two times of the X-ray photoetching using the prepared photomasks, thus finishing the manufacture of the varifocal X-ray combination lens. The present invention has the advantages of good focusing effect, slight scattering, high transmission of the X-ray radiation, simple technics, and so on.

Description

Technical field: [0001] The invention belongs to the field of optical technology, and relates to a microstructure X-ray optical element, in particular to a variable focal length X-ray combination lens and a manufacturing method thereof. Background technique: [0002] The X-ray combination lens is a new type of microstructure X-ray optical element proposed by Snigirev in 1996, which is especially suitable for high-energy X-ray bands (above 5keV). Since the device was proposed, foreign research on it has been very active. At present, combined refractive lenses have proved to have great advantages: they can focus high-energy X-rays, have high focusing efficiency, do not need to refract the optical path, are easy to arrange and operate, have good high temperature stability and are easy to cool, and can eliminate spherical aberration, etc. . In recent years, researches on various applications based on X-ray combined lens focusing and collimation are very active. Examples inclu...

Claims

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Application Information

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IPC IPC(8): G02B3/00G02B3/14G21K1/00G03F7/00
Inventor 梁静秋乐孜纯黄鑫华梁中翥
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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