Process for mfg. unidimensional X ray refracted diffraction micro structural component of aluminium material

A manufacturing method and X-ray technology, applied in the field of X-ray microstructured optical devices, can solve the problems of small material restrictions, large material restrictions, and low surface roughness, so as to reduce X-ray absorption, improve light collection aperture, and focus spot quality good effect

Inactive Publication Date: 2006-06-14
乐孜纯
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In order to overcome the problems of small device depth, large material restrictions, and high roughness in existing manufacturing technologies, a device with large structural depth, small material restrictions, high processing accu...

Method used

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  • Process for mfg. unidimensional X ray refracted diffraction micro structural component of aluminium material

Examples

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Effect test

Embodiment 1

[0032] Reference attached figure 1 , A method for manufacturing a one-dimensional X-ray refractive diffraction microstructure device made of aluminum material. The one-dimensional X-ray refractive diffraction microstructure device is composed of a plurality of lens units in a coaxial order. The lens is composed of the main body of the gap. The upper side wall of the lens is provided with upward stepped steps, and the step width of each step is equal; the lower side wall of the lens is provided with an axis as the center line and the upper side of the lens The steps of the wall are symmetrically arranged downward step-like steps, the lens is provided with the open air gap, the cross-sectional shape of the air gap is elliptical, and the air gap corresponds to the largest diameter size in the minor axis direction of the ellipse The size of the ellipse is smaller than the minor axis of the ellipse, the major axis of the elliptical air gap of the lens is on the same straight line, and ...

Embodiment 2

[0051] In the technical solution of this embodiment, the metal material electroformed cathode film described in step (B) is titanium material, and the thickness of the PMMA coated on the surface of the titanium sheet in step (I) is 500 micrometers, and the remaining steps are the same as in Example 1.

Embodiment 3

[0053] In the technical solution of this embodiment, the metal material electroformed cathode film in step (B) is nickel material, the thickness of PMMA coated on the surface of the titanium sheet in step (I) is 2000 microns, and the remaining steps are the same as in Example 1.

[0054] Process tests have been performed on the above three embodiments, and it can be seen from the test results that they all meet the requirements of the structural shape and size of the X-ray composite lens, and the process test effect of embodiment 2 is the best.

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Abstract

The invention relates to aluminum material one dimension X ray diffraction refraction microstructure device manufacturing method. It includes the following steps: making ultraviolet light photolithography mask and its edition; preparing X ray photolithography base body; and forming aluminum material one dimension X ray diffraction refraction microstructure device. The invention optimizes one dimension X ray diffraction refraction microstructure device face form shape. Its aberration is almost zero. And the quality of the focal spot is good. It offers manufacturing technique pointed to aluminum material one dimension X ray diffraction refraction microstructure device and increase device depth size for scores times. Thus this can greatly improve depth direction light gathering caliber, and improve X ray radiation transmissibility.

Description

(1) Technical field [0001] The invention relates to an X-ray microstructure optical device, in particular to a manufacturing process of a microstructure X-ray optical device based on the dual effects of refraction and diffraction, and is suitable for the occasion of manufacturing one-dimensional X-ray refractive diffraction microstructure devices of aluminum material. (2) Background technology [0002] The X-ray combination lens is an X-ray microstructure optical device based on the refraction effect, which is suitable for high-energy X-ray bands (that is, the X-ray radiation energy exceeds 5keV) proposed by A. Snigirev in 1996. It has the advantages of no need to deflect the light path, good high temperature stability and easy cooling, simple and compact structure, and low requirements for lens surface roughness. It has broad application prospects in the field of ultra-high resolution X-ray diagnostic science and technology. In recent years, research on various X-ray diagnostic ...

Claims

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Application Information

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IPC IPC(8): G02B3/00A61N5/10G01N23/083G03F1/22G03F7/20
Inventor 乐孜纯董文梁静秋
Owner 乐孜纯
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