Electromagnetic noise suppressor, article with electromagnetic noise suppression function, and their manufacturing methods
A technology for noise suppression and manufacturing method, which is applied to magnetic objects, circuits, magnetic materials, etc., and can solve the problems of insufficient sturdiness, softness, light weight, and large thickness of electromagnetic wave interference suppressors.
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Embodiment 1
[0285] In a polyethylene terephthalate film (hereinafter referred to as PET) with a thickness of 12 μm as a substrate (shear modulus of 3.8×10 9 (Pa), carbon dioxide transmittance is 1×10 -11 [cm 3 (STP)cm / (cm 2 ×s×cmHg)], the average surface roughness is 1.8μm), and the Mn-Zn system high magnetic permeability ferrite with a converted film thickness of 3nm is sputtered by the facing target magnetron sputtering method to form a composite layer. The surface resistance of the composite layer was carefully measured by the DC 4-terminal method. In addition, this film was adjusted to a desired size, a polyester-based adhesive was inserted and laminated in the middle of ten films, and they were integrated by vacuum press molding to obtain an electromagnetic wave noise suppressor with a total thickness of 138 μm. . Next, specific gravity and electromagnetic wave noise suppression characteristics were measured. The results are shown in Table 1.
Embodiment 2
[0287] On the PET film with a thickness of 25 μm as a support layer, a silicon (oxygen) rubber (shear modulus of 1×10) with a thickness of 20 μm is set as a substrate. 7 (Pa), the transmittance of carbon dioxide gas is 2.2×10 -7 [cm 3 (STP)cm / (cm 2 ×s×cmHg)]), on which, by facing the target magnetron sputtering method, the Fe-Ni system soft magnetic metal with a film thickness of 20nm is sputtered to form a composite layer. The surface resistance of the composite layer was carefully measured by the DC 4-terminal method. Furthermore, this thin film was adjusted to a desired size to obtain an electromagnetic wave noise suppressor with a total thickness of 45 μm. Next, specific gravity and electromagnetic wave noise suppression characteristics were measured. The results are shown in Table 1.
Embodiment 3
[0289] On a PET film with a thickness of 25 μm as a support layer, a polyurethane gel (shear modulus of 1.7×10 6 (Pa), carbon dioxide transmittance is 5.3×10 -8 [cm 3 (STP)cm / (cm 2 ×s×cmHg)]) on it by magnetron sputtering method (non-facing target type), sputtering a Fe-Si-Al system soft magnetic metal with a conversion film thickness of 15nm to form a composite layer. The surface resistance of the composite layer was carefully measured by the DC 4-terminal method. Furthermore, 2 μm of urethane gel was coated on the composite layer, and sputtering was performed again. By repeating this process to set three composite layers, an electromagnetic wave noise suppression body with a total thickness of 79 μm was obtained. Next, specific gravity and electromagnetic wave noise suppression characteristics were measured. The results are shown in Table 1.
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