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Process for preparing diamond-like coating containing nano gold particles

A nano-gold particle and nano-particle technology, which is applied in metal material coating process, liquid chemical plating, coating, etc., can solve the problems of unfavorable large-area deposition and large-scale industrial production, high preparation cost, and complicated equipment. Achieve the effect of good uniformity, low preparation cost and uniform distribution

Inactive Publication Date: 2005-06-29
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

However, their complex equipment and high preparation cost are not conducive to large-area deposition and large-scale industrial production

Method used

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Embodiment 1

[0011] Dissolve 0.1g of polycarbobenzene powder in 10ml of tetrahydrofuran, and then add 0.05g of chloroauric acid to prepare a mixed solution of tetrahydrofuran containing polycarbobenzene-chloroauric acid; then apply the solution to the pre-cleaned surface by spin coating On the monocrystalline silicon wafer, after the organic solvent volatilizes, a precursor film with a film thickness of 1000 nanometers is formed on the surface of the silicon wafer; the silicon wafer coated with the chloroauric acid-polymer film is placed in a tube furnace, and Under the protection of argon, first raise the temperature to 150°C, and then keep the temperature for tens of minutes. After the tetrahydrofuran is completely volatilized, then quickly raise the temperature to 600°C, heat treatment at this temperature for 1-2 hours, and finally cool naturally to room temperature to prepare gold-containing nanoparticles. DLC film.

[0012] The prepared DLC film containing gold nanoparticles and the p...

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Abstract

The invention discloses a preparation method of a diamond-like carbon film containing nano-gold particles. The method prepares a tetrahydrofuran precursor solution containing polycarbobenzene-chloroauric acid, and then coats the mixed solution on the surface of single-crystal silicon by spin coating. After the organic solvent is volatilized, chloroauric acid-polyauric acid is formed on the silicon surface Carbon benzene film; the silicon wafer coated with the film is treated at 500-700 DEG C for 1-2 hours under the protection of argon gas, and then naturally cooled to room temperature to obtain a diamond-like carbon film containing gold nanoparticles. The invention is characterized in that the preparation process is simple and the diamond-like composite film containing metal nano-particles is synthesized in one step. The film is expected to be used in mechanical friction, electrochemical electrodes, metal catalysis, optics, and other fields.

Description

technical field [0001] The invention relates to a preparation method of a diamond-like carbon film containing nano-gold particles. Background technique [0002] Diamond-like carbon (DLC) films have many excellent properties in advanced chemistry, electronics, optics and mechanics, such as extremely high hardness, chemical inertness, low coefficient of friction, high resistance, good thermal conductivity and Excellent optical permeability, etc., so it can be widely used as wear-resistant protective layer for optical devices, magnetic memory devices, high-temperature semiconductor materials, mechanical tools and medical orthopedics. A lot of research on DLC films has focused on its preparation technology. At present, chemical vapor deposition and physical vapor deposition are generally used to prepare diamond-like carbon films, such as microwave plasma assisted deposition, magnetron sputtering deposition and pulsed laser deposition. High quality DLC films can be obtained. Ho...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C18/12
Inventor 杨生荣徐洮阎兴斌
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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