Preparation method of steel surface DLC (diamond-like carbon) coating based on ionic nitriding and multi-layer compounding

An ion nitriding, multi-layer composite technology, applied in the coating, superimposed layer plating, ion implantation plating and other directions, can solve the friction coefficient of diamond-like coating is sensitive, the internal stress of diamond-like coating is large, and the metal matrix Problems such as poor bonding force, to achieve the effect of increasing hardness gradient, improving thermal stability, and improving bonding force

Pending Publication Date: 2022-03-04
UNIV OF SCI & TECH BEIJING +1
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  • Claims
  • Application Information

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Problems solved by technology

[0006] The invention proposes a wear-resistant and corrosion-resistant DLC coating based on ion nitriding and multi-layer composite on the steel surface. The thickness of the diamond-like carbon coating is insufficient and the friction coefficient of the diamond-like coating is more sensitive to the environment and the thermal stability of the coating is poor.

Method used

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  • Preparation method of steel surface DLC (diamond-like carbon) coating based on ionic nitriding and multi-layer compounding
  • Preparation method of steel surface DLC (diamond-like carbon) coating based on ionic nitriding and multi-layer compounding

Examples

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Embodiment 1

[0039] ① Ion nitriding on the surface of the base steel

[0040] First, put the 25Cr3Mo3NiNbZr steel sample into the high-energy ion source-assisted PECVD equipment, and vacuumize to 5×10 -3 Below Pa, and heated to 400°C; then etched the surface of the workpiece with Ar ions for 40 minutes; then passed through 300sccm Ar, 400sccm N 2 、1000sccmH 2 The mixed gas, the ion source filament current was adjusted to 250A, the ion column current was set to 120A, the bias power supply was in unipolar pulse mode, the output voltage was 100V, and the ion nitriding was carried out for 100min to obtain a 20μm thick ion nitriding layer.

[0041] ② Deposition of Cr transition layer

[0042]The furnace temperature was lowered to 200°C, and the surface of the workpiece was etched with Ar ions for 20 min. Then, Ar gas was introduced until the pressure was 0.4 Pa, and the power of Cr and WC cathodes was set to 10 kW, and the surface of the target was cleaned for 10 min. Continuously feed argo...

Embodiment 2

[0050] ① Ion nitriding on the surface of the base steel

[0051] First, put the AF1410 steel sample into the high-energy ion source assisted PECVD equipment, and vacuumize to 5×10 -3 Below Pa, and heated to 450°C; then etched the surface of the workpiece with Ar ions for 30 minutes; then passed through 300sccm Ar, 400sccm N 2 、1000sccmH 2 The ion source filament current is adjusted to 200A, the ion column current is set to 100A, the bias power supply adopts unipolar pulse mode, the pulse frequency is 60kHz, the duty cycle is 0.75, the output voltage is 100V, and the ion nitriding takes 150min to obtain 30μm Thick ionic nitride layer.

[0052] ② Deposition of Cr transition layer

[0053] First, the furnace temperature was lowered to 150°C, and the surface of the workpiece was etched with Ar ions for 30 min. Then, Ar gas was introduced until the pressure was 0.3 Pa, and the power of Cr and WC cathodes was set to 10 kW, and the surface of the target was cleaned for 10 min. C...

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Abstract

The invention provides a preparation method of a steel surface DLC (diamond-like carbon) coating structure based on ionic nitriding and multi-layer compounding, and belongs to the field of steel surface coating materials. The coating comprises a steel matrix surface ion nitriding layer, a Cr transition layer, a gradient change Cr / WC transition layer, a W-doped DLC layer and a hydrogen-containing DLC layer. Through the design of the DLC coating, gradient increase of the hardness of the coating is realized, and the internal stress of the coating is effectively released, so that the binding force of a film substrate is improved, and the thermal stability of the coating is improved. The coating can effectively improve the wear resistance and corrosion resistance of the steel for the special structure, better meet the protection requirement of the steel for the special structure, and greatly prolong the service life of the steel for the special structure.

Description

[0001] Technical field: [0002] The invention relates to the technical field of steel surface coating materials, in particular to a diamond-like carbon (DLC, DiamondLike Carbon) coating and a preparation method thereof. Background technique: [0003] In the harsh working environment, special structural steel needs to face problems such as high stress load, high-speed friction and environmental corrosion, and these problems can easily lead to shortened service life of special structural steel, and any equipment failure in the production process Any problem will affect the quality of the product, or make it impossible to continue the production, and even endanger the safety of equipment and personal, resulting in accidents and property losses. Therefore, its special working environment requires that it must have good wear resistance and corrosion resistance. [0004] Due to the advantages of high hardness, excellent wear resistance and good chemical inertness, diamond-like coa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C28/00C23C14/02C23C14/06C23C14/16C23C14/34C23C16/26C23C8/38
CPCC23C28/325C23C28/324C23C28/343C23C8/38C23C14/024C23C14/165C23C14/34C23C14/3464C23C14/3492C23C14/0688C23C14/0057C23C14/0605C23C16/26
Inventor 魏俊俊黄珂顾德华毛昌海帅小峰李成明高旭辉
Owner UNIV OF SCI & TECH BEIJING
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