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Preparation method of magnesium oxide secondary emitter

A technology of magnesium oxide and emitters, which is applied in the manufacture of secondary emitter electrodes, the manufacture of light-emitting cathodes, sputtering coating, etc., can solve the problems of excessive gain attenuation, low gain of electron multipliers, and weak bombardment resistance

Pending Publication Date: 2021-10-01
NANJING SANLE GROUP
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  • Abstract
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Problems solved by technology

b class = "d_n"> [0006] purpose of the invention: the purpose of the invention is aimed at the deficiencies of the above-mentioned technology, and a kind of preparation method of the secondary emitter of electron multiplier for cesium beam tube of magnetic separation state is provided, so that the obtained oxidation The magnesium film is denser and firmer, which solves the problem of low gain of the existing electron multiplier, and the secondary emitter has weak bombardment resistance and too fast gain decay under the long-term action of the ion with high bombardment energy or strong electron beam current, which makes the assembly The electron multiplier of the secondary emitter can meet the requirements of long-term continuous use of cesium beam tubes and the life requirements of cesium beam tubes

Method used

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  • Preparation method of magnesium oxide secondary emitter
  • Preparation method of magnesium oxide secondary emitter
  • Preparation method of magnesium oxide secondary emitter

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Embodiment 1

[0097] A preparation method of a magnesium oxide secondary emitter, comprising the steps of:

[0098] (1) Preparation of composite transition layer

[0099] (1.1) Place the processed non-magnetic stainless steel emitter substrate in the magnetron sputtering table, place the side that needs to be coated upwards, and the parts must not block each other;

[0100] (1.2) When the vacuum degree of the cavity reaches better than 5.0×10 -4 Start the heating system at Pa, heat the base substrate temperature of the emitter to 400°C and keep it warm for 1 hour, and degas the non-magnetic stainless steel multiplier pole pieces;

[0101] (1.3) After baking and degassing, when the temperature drops below 150°C, open the valve of the gas mass flow meter and adjust the flow of argon to keep the vacuum at 2.0×10 -2In the Pa state, turn on the auxiliary deposition high-voltage power supply, adjust the voltage to 200V, turn on the magnetron bombardment high-voltage power supply and film thickn...

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Abstract

The invention discloses a preparation method of a magnesium oxide secondary emitter. The method is characterized in that metal nickel, silver and a silver-magnesium alloy are used as target materials and are alternately sputtered on the surface of an emitter to obtain a composite transition layer, the matrix emitting electrode of the composite transition layer and an evaporation source made of a volatilizable organic magnesium salt and alumina powder are put into vacuum equipment respectively, after vacuumizing, the evaporation source is heated to 200-300 DEG C, the matrix emitting electrode is heated to 600-900 DEG C, then oxygen and nitrogen are filled to sensitize the composite layer on the surface of the emitting electrode in an oxygen atmosphere, and the magnesium salt is decomposed on the surface of the emitting electrode and reacts with the oxygen to generate magnesium oxide which is directly attached to the surface of the matrix, so that the magnesium oxide secondary emitter is prepared. According to the manufacturing method of the secondary emitter of the electron multiplier for the cesium-beam tube, the manufactured magnesium oxide film is more compact and firmer, and the electron multiplier assembled with the secondary emitter can meet the requirement for long-time continuous use of the cesium-beam tube and the requirement for the service life of the cesium-beam tube.

Description

technical field [0001] The invention relates to an electron multiplier, in particular to a method for manufacturing a secondary emitter of an electron multiplier for a magnetically separated cesium beam tube. Background technique [0002] The cesium atomic clock is a key device for measuring the accuracy of space positioning in navigation and positioning systems and deep space detectors. It is used in high-speed communication networks and other ground, sea, air, space measurement and control and communication systems. The electron multiplier is the most important component of the cesium atomic clock, which directly determines the service life, main technical performance indicators and reliability of the cesium atomic clock. For a long time, the problem of short service life of electron multipliers has seriously restricted the engineering application of cesium atomic clocks. Under the long-term action of the electron beam, the bombardment resistance is weak, and the gain dec...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J9/12C23C14/35C23C14/16C23C20/08C23C28/00
CPCH01J9/125C23C14/352C23C14/165C23C18/1216C23C28/321C23C28/345
Inventor 王浩东李诚迪芮杰邓涛张杰
Owner NANJING SANLE GROUP
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