A kind of preparation method of semi-insulating indium phosphide
A semi-insulating indium phosphide technology, applied in the field of semi-insulating indium phosphide preparation, can solve the problems of less annealing of indium phosphide and inapplicability of indium phosphide
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[0037] The present invention will be further described below with reference to the accompanying drawings.
[0038] see figure 1 , a preparation device for semi-insulating indium phosphide, including a furnace body, a crucible 11 and a heating and support system, a seed rod 3 passing through the furnace body, and a hydrogen pipe 25 and an inert gas pipe 26 on the side of the furnace body. , Exhaust pipe 19; an injector 7 is provided in the furnace body, and the injection lifting rod 6 connecting the injector 7 protrudes out of the furnace body to connect to the drive device (marked in the figure); an in-situ annealing device is also set in the furnace body.
[0039] The heating and support system of the crucible 11 includes a heat preservation jacket 12 , a main heater 15 , a graphite support 16 , a crucible rod 17 , and a lower heater 18 .
[0040] see figure 2 , the lift rod 6 is connected to the injector 7 through the injection lift rod right support 6-1 and the injection...
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