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Flexible capacitive pressure sensor and preparation method thereof

A pressure sensor and flexible capacitor technology, applied in the field of flexible sensors, can solve the problems of low relative value and reduce the flexibility requirement of the electrode layer, and achieve the effect of improving sensitivity, improving accuracy and long-term effect, and high sensitivity

Pending Publication Date: 2021-03-12
YANSHAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this patent has the following limitations: by filling the electrode layer with nickel-plated carbon fiber rigid material, although the conductivity is enhanced, the flexibility of the electrode layer for practical applications is reduced, and the sensor response sensitivity is about 0.24kPa -1 , the relative value is not high

Method used

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  • Flexible capacitive pressure sensor and preparation method thereof
  • Flexible capacitive pressure sensor and preparation method thereof
  • Flexible capacitive pressure sensor and preparation method thereof

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Effect test

Embodiment 1

[0038] This embodiment provides a flexible capacitive pressure sensor, such as figure 1 As shown, it includes: a first electrode plate 11, a second electrode plate 12, a flexible dielectric layer 31 and an electrostatic film, the first electrode plate 11 is opposite to the second electrode plate 12, and the first electrode plate 11 and the second electrode plate The conductive film surface of electrode plate 12 is all attached with electrostatic film, and promptly the conductive film surface of first electrode plate 11 is all attached with first electrostatic film 21, and the conductive film surface of second electrode plate 12 is all attached with second electrostatic film 22, The flexible dielectric layer 31 is disposed between the first electrode plate 11 and the second electrode plate 12 . Wherein, the flexible dielectric layer 31 is a composite material obtained by combining modified titanium dioxide and polyurethane sponge. The compression of the flexible dielectric lay...

Embodiment 2

[0045] This embodiment provides a flexible capacitive pressure sensor whose structure is consistent with that of Embodiment 1, and its preparation method includes:

[0046] (1) First cut the polyurethane sponge into a size (2×2×0.1 cm), wash it with ultrapure water, and dry it at 50° C. for 10 h.

[0047] (2) Then, take 10 ml of 1 mg / ml titanium dioxide aqueous solution and put it in a beaker, and stir it well at 30°C. Then 0.1 g of APTES was added, and ultrasound was performed for 1 h at room temperature to form a second solution.

[0048] (3) Immerse the polyurethane sponge in the second solution for 3 minutes and take it out, that is, the mass ratio of titanium dioxide nanoparticles to polyurethane sponge is 2:3, and APTES is used as an intermediate to connect polyurethane and titanium dioxide, so that the two are closely combined without destroying its structure. The corresponding dielectric layer M2 is obtained.

[0049] (4) Wash the flexible electrode ITO / PET with ultr...

Embodiment 3

[0051] This embodiment provides a flexible capacitive pressure sensor whose structure is consistent with that of Embodiment 1, and its preparation method includes:

[0052] (1) First cut the polyurethane sponge into a size (2×2×0.1 cm), wash it with ultrapure water, and dry it at 50° C. for 10 h.

[0053] (2) Then take 15ml of 1mg / ml titanium dioxide aqueous solution and put it in a beaker, and heat it in a water bath at 90°C to evaporate the solvent to 10ml. Then 0.1 g of APTES was added, and ultrasound was performed for 1 h at room temperature to form a third solution.

[0054] (3) Immerse the polyurethane sponge in the third solution for 3 minutes and take it out, that is, the mass ratio of titanium dioxide nanoparticles to polyurethane sponge is 1:1, and APTES is used as an intermediate to connect polyurethane and titanium dioxide, so that the two are closely combined without destroying its structure. The corresponding dielectric layer 3 is obtained.

[0055] (4) Wash th...

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Abstract

The invention provides a flexible capacitive pressure sensor and a preparation method thereof, and belongs to the field of flexible sensors. The sensor comprises a first electrode plate, a second electrode plate, a flexible dielectric layer and electrostatic films, the first electrode plate and the second electrode plate are oppositely arranged, the electrostatic films are attached to the surfaceof a conductive film of the first electrode plate and the surface of a conductive film of the second electrode plate, and the flexible dielectric layer is arranged between the first electrode plate and the second electrode plate; and the flexible dielectric layer is a composite material obtained by combining modified titanium dioxide and polyurethane sponge. According to the invention, polyurethane combined with modified titanium dioxide is used as the flexible dielectric layer and is bonded with the flexible electrode in a pressurized manner, so that the preparation of the flexible capacitivepressure sensor with high sensitivity is realized, the sensor has extremely low detection limit, and the multifunctional measurement of the sensor is realized.

Description

technical field [0001] The invention relates to the field of flexible sensors, in particular to a flexible capacitive pressure sensor and a preparation method thereof. Background technique [0002] High technologies such as wearable exoskeletons, surveillance and reconnaissance sensors, individual radio stations, and intelligent robots are crucial to the development of modern industries, and flexible sensors are a key device that restricts the development of these technologies. The flexible sensor has the characteristics of controllable size, extremely light weight, and strong environmental adaptability. It senses the environment through changes in external pressure, and then generates a positive and correct response to the target to be measured. Therefore, it can be used for brain wave control and key parts of motorized equipment. Fault diagnosis, wearable exoskeleton, intelligent combat uniform and intelligent robot and other fields. At the same time, there are also exten...

Claims

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Application Information

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IPC IPC(8): G01L1/14
CPCG01L1/148
Inventor 徐朝鹏赵帅吕晓荣周震宇孙正灿边飞
Owner YANSHAN UNIV
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