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Metal oxide micro-nano structure as well as preparation method and application thereof

A technology of micro-nano structure and oxide, applied in the direction of final product manufacturing, sustainable manufacturing/processing, climate sustainability, etc., can solve the problem of poor connectivity of nanoparticles, discontinuous morphology, metal oxide micro-nano Problems such as low detector performance, to achieve the effect of increasing continuity, continuous and uniform nanoparticles, and improving mobility

Active Publication Date: 2021-01-26
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In view of the defects of the prior art, the object of the present invention is to provide a laser direct writing preparation method capable of improving the morphology of the metal oxide laser direct writing micro-nano structure, and further improving the application performance of the metal oxide micro-nano structure, aiming to solve the problem of In the prior art, the nanoparticle connectivity of the metal oxide micro-nano structure product by laser direct writing is not good, and the morphology is discontinuous, which leads to the technical problem of low performance of the metal oxide micro-nano photodetector based on this morphology.

Method used

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  • Metal oxide micro-nano structure as well as preparation method and application thereof
  • Metal oxide micro-nano structure as well as preparation method and application thereof
  • Metal oxide micro-nano structure as well as preparation method and application thereof

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preparation example Construction

[0042] A method for preparing a metal oxide micro-nano structure provided by the invention comprises the following steps:

[0043](1) The metal oxide precursor is mixed with a solvent, and the metal oxide precursor sol-gel is prepared by a sol-gel method;

[0044] (2) adding an alcohol organic modifier to the metal oxide precursor sol-gel obtained in step (1), and mixing uniformly to obtain a modified precursor sol-gel;

[0045] (3) coating the modified precursor sol-gel obtained in step (2) on the substrate to obtain a metal oxide precursor sol-gel film;

[0046] (4) Using a femtosecond laser to directly write the precursor sol-gel film, using the heat generated at the focal point of the femtosecond laser to make the metal oxide precursor react to form a metal oxide, and at the same time form a metal oxide on the substrate surface. Oxide micro-nanostructures.

[0047] The invention adds an alcohol organic modifier to the metal oxide precursor sol-gel, which can significantl...

Embodiment 1

[0075] Laser-induced synthesis of ZnO UV photodetectors with improved product morphology using glycerol modifiers.

[0076] Adding an appropriate amount of glycerol modifier to the precursor solution can significantly improve the morphology of the laser-induced ZnO nanoparticle product and increase the connectivity of the sample, thereby significantly improving the performance of the fabricated UV photodetector. Such as figure 1 As shown, the specific steps are as follows:

[0077] (1) Formation of precursor solution: First, 0.54 g of zinc acetate dihydrate powder and 0.155 mL of monoethanolamine solution were added to 5 mL of ethylene glycol methyl ether solvent, and stirred in a water bath heating environment at 60 ° C for two hours to fully dissolve it to obtain a sol-gel precursor solution.

[0078](2) Modification of the sol-gel precursor solution: in the obtained sol-gel precursor solution, adding a volume percent of 3% glycerol modifier (i.e. the volume of the added g...

Embodiment 2

[0084] Laser-induced synthesis of ZnO UV photodetectors with improved product morphology using glycerol modifiers.

[0085] Steps (1) (2) (3) (4) (5) are the same as in Example 1, except that step (2) adds 6.7% glycerol modifying agent by volume percentage to the obtained sol-gel solution, fully stirs Evenly prepared for later use.

[0086] (6) Detection of ultraviolet light signals: the micro-nano ultraviolet detector fabricated after the above-mentioned improved sample morphology and connectivity was tested for sensing performance under normal temperature and pressure. The ultraviolet detector made after adding 6.7% glycerin modifier, in a dark environment without ultraviolet light irradiation, when the voltage across the device is increased to 10V, the device current is 3nA. Under the irradiation of 365nm ultraviolet light, the photocurrent of the device is 420nA, the switch ratio is about 150, and the performance is significantly improved compared with the sample without ...

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Abstract

The invention belongs to the technical field of micro-nano material synthesis and device preparation, and particularly relates to a metal oxide micro-nano structure and a preparation method and application thereof. The preparation method comprises the following steps: mixing a metal oxide precursor sol-gel with an alcohol organic modifier, coating the mixture on the surface of a substrate, performing direct writing on a precursor sol-gel film by adopting femtosecond laser, and reacting the metal oxide precursor to generate metal oxide by utilizing heat generated at a femtosecond laser light focal point, meanwhile, forming a metal oxide micro-nano structure on the surface of the substrate; as the alcohol organic modifier is added into the sol-gel, experiments prove that the organic modifiercan significantly improve the micro-nano structure morphology of the obtained metal oxide, so that the nanoparticles are continuous and uniform; and the switch ratio of the ultraviolet micro-nano photoelectric detector prepared in the preferred embodiment is improved by 64 times compared with that of the ultraviolet micro-nano photoelectric detector without the alcohol organic modifier.

Description

technical field [0001] The invention belongs to the technical field of synthesis and assembly of micro-nano materials and device preparation, and more specifically relates to a metal oxide micro-nano structure, its preparation method and application. Background technique [0002] In recent years, with the development of basic disciplines such as physics and chemistry and semiconductor microelectronics technology, human beings have made unprecedented breakthroughs in the exploration of the micro-nano scale world. There are huge applications in medical testing. Among the active materials of photodetectors, metal oxides have become the preferred materials for photodetectors due to their excellent performance and low cost. However, metal oxide-based photodetectors still lack flexible processing methods and simple and convenient preparation processes. [0003] The traditional preparation techniques of metal oxide nanomaterials usually include chemical vapor deposition, hydrothe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/18H01L31/032H01L31/08
CPCH01L31/18H01L31/032H01L31/08Y02P70/50
Inventor 熊伟王莹琛徐一诺喻克望龙婧焦玢璋刘耘呈范旭浩高辉邓磊敏
Owner HUAZHONG UNIV OF SCI & TECH
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