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A kind of metal oxide micro-nano structure, its preparation method and application

A micro-nano structure, oxide technology, applied in final product manufacturing, sustainable manufacturing/processing, climate sustainability, etc., can solve the problem of low performance of metal oxide micro-nano photodetectors, poor nanoparticle connectivity, Discontinuous morphology and other problems, to achieve the effect of improving mobility, increasing continuity, and improving morphology

Active Publication Date: 2022-05-13
HUAZHONG UNIV OF SCI & TECH
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0006] In view of the defects of the prior art, the object of the present invention is to provide a laser direct writing preparation method capable of improving the morphology of the metal oxide laser direct writing micro-nano structure, and further improving the application performance of the metal oxide micro-nano structure, aiming to solve the problem of In the prior art, the nanoparticle connectivity of the metal oxide micro-nano structure product by laser direct writing is not good, and the morphology is discontinuous, which leads to the technical problem of low performance of the metal oxide micro-nano photodetector based on this morphology.

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  • A kind of metal oxide micro-nano structure, its preparation method and application
  • A kind of metal oxide micro-nano structure, its preparation method and application
  • A kind of metal oxide micro-nano structure, its preparation method and application

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preparation example Construction

[0042] The present invention provides a method for preparing a metal oxide micro-nano structure, comprising the following steps:

[0043] (1) The metal oxide precursor is mixed with the solvent, and the metal oxide precursor sol gel is prepared by the sol gel method;

[0044] (2) Add alcohol organic modifier to the metal oxide precursor sol gel obtained in step (1), and mix evenly to obtain a modified precursor sol gel;

[0045] (3) The modified precursor sol gel obtained in step (2) is coated on the substrate to obtain a metal oxide precursor sol gel film;

[0046] (4) The femtosecond laser is used to write the precursor sol gel film directly, and the heat generated at the focus of the femtosecond laser light is used to react to the metal oxide precursor to generate metal oxide, and the metal oxide micro-nano structure is formed on the substrate surface.

[0047] The present invention adds alcohol organic modifiers to the metal oxide precursor sol gel, which can significantly impro...

Embodiment 1

[0075]Laser-induced synthesis of zinc oxide ultraviolet photodetector using glycerol modifiers to improve the morphology of the product.

[0076] Adding an appropriate amount of glycerol modifier to the precursor solution can significantly improve the morphology of the laser-induced zinc oxide nanoparticle products, increase sample connectivity, and significantly improve the performance of the ultraviolet photodetector produced. as Figure 1 As shown, the specific steps are as follows:

[0077] (1) Formation of precursor solution: First, 0.54g of zinc acetate dihydrate powder was added to 5mL of monoethanolamine solution with 0.155mL of monoethanolamine solution, stirred in a water bath at 60 °C for two hours to make it fully dissolved to obtain a sol gel precursor solution.

[0078] (2) Modification of the sol gel precursor solution: add a glycerol modifier with a volume percentage of 3% to the resulting sol gel precursor solution (that is, the volume of the added glycerol and t...

Embodiment 2

[0084] Laser-induced synthesis of zinc oxide ultraviolet photodetector using glycerol modifiers to improve the morphology of the product.

[0085] Step (1)(2)(3)(4)(5) with Example 1, the difference is that step (2) to the resulting gel solution is added a volume of 6.7% glycerol modifier, stirred well after standby.

[0086] (6) Detection of ultraviolet light signal: The micro-nano ultraviolet detector made after the above improvement of sample morphology and connectivity detects the sensing performance at room temperature and pressure. The ultraviolet detector made after adding 6.7% glycerol modifier, in the dark environment without ultraviolet light illumination, when the voltage across the device is increased to 10V, the device current is 3nA. Under the illumination of 365nm ultraviolet light, the photocurrent of the device is 420nA, the switching ratio is about 150, and the performance is significantly improved than the sample without glycerol modifier and the sample with 3% ...

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Abstract

The invention belongs to the technical field of micro-nano material synthesis and device preparation, and more specifically relates to a metal oxide micro-nano structure, its preparation method and application. In the present invention, the metal oxide precursor sol-gel is mixed with an alcohol organic modifier and then coated on the surface of the substrate, and the precursor sol-gel film is directly written by using a femtosecond laser. The heat generated causes the metal oxide precursor to react to form metal oxide, and at the same time forms a metal oxide micro-nano structure on the substrate surface; since an alcohol organic modifier is added to the sol-gel, the organic modifier undergoes Experiments have proved that the obtained metal oxide micro-nano structure morphology can be significantly improved, so that the nanoparticles are continuous and uniform. The on-off ratio has been improved by a factor of 64.

Description

Technical field [0001] The present invention belongs to the field of micro-nano material synthesis and assembly and device preparation technology, more particularly, relates to a metal oxide micro-nano structure, preparation methods and applications thereof. Background [0002] In recent years, with the development of basic disciplines such as physics and chemistry and semiconductor microelectronics technology, mankind has made unprecedented breakthroughs in the exploration of the micro-nano-scale world, and micro-nano photodetectors have huge applications in military communications, missile early warning, disaster weather forecasting, and biomedical detection. Among the active materials of photodetectors, metal oxides have become the preferred materials for photodetectors with excellent performance and low cost. However, the current photodetectors based on metal oxides still lack flexible processing means and simple and convenient preparation processes. [0003] The traditional...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18H01L31/032H01L31/08
CPCH01L31/18H01L31/032H01L31/08Y02P70/50
Inventor 熊伟王莹琛徐一诺喻克望龙婧焦玢璋刘耘呈范旭浩高辉邓磊敏
Owner HUAZHONG UNIV OF SCI & TECH
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