Flexible nerve photoelectrode for nerve recording and stimulation and preparation method thereof
A technology of photoelectrodes and laser diodes, which is applied to lasers, laser components, semiconductor lasers, etc., can solve problems such as stimulation and the inability to adjust the position of flexible LED electrodes, and achieve the effects of reducing electromagnetic interference, reducing brain tissue damage, and good flexibility
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Embodiment 1
[0060] The specific steps of the preparation method of the flexible neural photoelectrode for nerve recording and stimulation are as follows:
[0061] S1: Using ultra-thin PI as the recording electrode insulating layer, and integrating SU-8 optical waveguide on the insulating layer to realize photostimulation. In the conductive layer in the insulating layer, the power supply wire of the laser diode 6 is surrounded by a ground wire and a metal shielding layer, and the electromagnetic interference of the laser diode 6 to the recording channel is reduced by electromagnetic shielding.
[0062] S2: use the LD placement groove to realize the alignment of the laser diode 6 and the optical waveguide structure on the probe, and realize the thermocompression bonding between the LD placement groove and the LD bonding pad 1-2 through the ACF conductive glue.
[0063] The specific process of step S1 is as follows:
[0064] Use ordinary single-sided polished silicon wafers as the substrate...
Embodiment 2
[0092] Preparation of flexible neural photoelectrode: Same as Example 1.
[0093] Electromagnetic shielding layer design: same as embodiment 1.
[0094] Flexible neural photoelectrode integrated with LD:
[0095] In the first step, use a dispenser to apply conductive silver paste on the pad in the LD placement groove. As an alternative, a steel needle can also be used to replace the dispenser to manually apply conductive silver paste in the groove. Pay attention to the amount of conductive silver paste used during the coating process to avoid blocking the light outlet of the laser diode 6 or connecting the upper and lower pads of the laser diode 6 in series due to the overflow of the conductive silver paste.
[0096] In the second step, use a wire bonding machine to put the cathode pad of laser diode 6 down into the LD placement groove and align it with the optical waveguide structure on the probe
[0097] . The specific steps are as follows: place the glass slide containi...
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