Single-heat-source T-shaped micro-mechanical biaxial thin-film gyroscope

Abstract

The invention discloses a single-heat-source T-shaped micromechanical biaxial thin-film gyroscope which comprises a sensitive layer and a cover plate, an isolation resistor, three heaters and two pairs of thermistors which are of a T-shaped structure are arranged on the upper surface of the sensitive layer, and a T-shaped groove is etched in the lower surface of the sensitive layer; the electrifying mode of the three heaters is periodic square wave type electrifying; and a groove is etched on the cover plate and is hermetically connected with the upper surface of the sensitive layer. The single-heat-source T-shaped micromechanical biaxial thin-film gyroscope inherits the advantages of no solid sensitive mass block, vibration resistance, impact resistance and the like of the micro heat-flowgyroscope. The process adopted by the invention is compatible with an integrated circuit process, so that the driving circuit and the extraction circuit can be easily manufactured on the same chip, and the potential of high integration level is achieved. As the sensitive mass does not contain a solid mass block, compared with micro inertial sensors adopting other working principles, the thin-filmgyroscope has the advantages of large impact resistance, the simple structure, extremely low cost and high reliability.

Description

technical field [0001] The invention relates to the technical field of using Coriolis force to deflect a heat flow sensitive body to detect the angular velocity and attitude parameters of a moving body, in particular to a T-shaped micromechanical biaxial film gyroscope with a single heat source. Background technique [0002] The miniature inertial sensor made by MEMS (Micro-Electro-Mechanical-System) technology has many advantages such as mass production, low cost, small size, and low power consumption. It is an ideal product for medium and low-precision miniature inertial sensors in the future. . Gyroscopes and accelerometers are the core inertial sensors for the measurement and control of carrier motion attitude, and gyroscopes are sensors that are sensitive to angular parameters such as angular velocity and angular acceleration. The traditional miniature gyroscope (micromechanical gyroscope) is based on the Coriolis effect principle that exists when the high-frequency vi...

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Problems solved by technology

Chinese patent: A miniature four-channel circulating flow dual-axis silicon jet gyroscope (patent application number: 201510385582.4), which belongs to the miniature jet gyroscope. The piezoelectric film in the sensitive element increases the processing difficulty and cost, and the premise of maintaining the flow rate It is difficult to further reduce its volume

In Chinese patents 201410140298.6 and 201210130318.2, the main components in the sensor sensitive element-heater and thermistor both adopt a suspended cantilever beam structure. Since the heater and thermistor are suspended above the cavity, after the cavity is etched to release the structure, Stress will cause the heater and thermistor to deform or even break, resulting in low yield, and warping deformation will produce an asymmetric gas flow field without angular velocity input, resulting in angular velocity detection errors

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