Aluminum nitride ceramic with high thermal conductivity and high strength and preparation method thereof
A technology of aluminum nitride ceramics and aluminum nitride, which is applied in the field of ceramic materials, can solve the problems of high thermal conductivity, incompatibility, and high bending strength, and achieve excellent thermal properties, reduce contact thermal resistance, and reduce sintering temperature.
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[0028] A kind of preparation method of aluminum nitride ceramic provided by the invention comprises the following steps:
[0029] (1) mixing the aluminum nitride powder and the sintering aid to obtain a mixture;
[0030] (2) granulating, pressing and forming the mixture and performing pressureless sintering to obtain an aluminum nitride sintered body;
[0031] (3) The aluminum nitride sintered body is oxidized to obtain aluminum nitride ceramics, and the surface of the aluminum nitride ceramics has an oxide layer, and the main component of the oxide layer is aluminum oxide.
[0032] The sintering aids may be commonly used sintering aids, and in some preferred embodiments, the sintering aids are yttrium oxide powder and yttrium fluoride powder. Y 2 o 3 The ability to drive oxygen is strong. During the sintering process, the Al on the surface of AlN particles 2 o 3 Combined to generate one or more yttrium aluminates, the oxygen dissolved in the AlN lattice can be migrated t...
Embodiment 1
[0041] Example 1: The mass percentage of AlN powder is 97%, Y 2 o 3 2% by mass and YF 3 The mass percentage is 1%, the oxidation treatment temperature is 1000° C., and the oxidation time is 1 h.
Embodiment 2
[0042] Example 2: AlN powder mass percentage is 97%, Y 2 o 3 2% by mass and YF 3 The mass percentage is 1%, the oxidation treatment temperature is 1100° C., and the oxidation time is 1 h.
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