Titanium-silicon-molybdenum alloy target material and preparation method thereof

A molybdenum alloy and titanium-silicon technology is applied in the field of titanium-silicon-molybdenum alloy targets and their preparation, and can solve the problems of difficult production technology of titanium-silicon-molybdenum alloy targets and the like.

Inactive Publication Date: 2020-06-19
河北宏靶科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Because the production technology of titanium silicon molybdenum alloy target is very difficult, there are few literatures about its research, and there are few patented technologies.

Method used

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  • Titanium-silicon-molybdenum alloy target material and preparation method thereof

Examples

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preparation example Construction

[0031] The second aspect of the present invention provides a method for preparing a titanium-silicon-molybdenum alloy target, see figure 1 ,include:

[0032] S100. Put silicon powder with a purity of more than 99.5% and an average particle size of 5-10um and molybdenum powder with a purity of more than 99.5% and an average particle size of 5-8um into a high-energy ball mill, and place them under the protection of vacuum or high-purity argon Down mixing for 8-20 hours;

[0033] S200. Put the silicon-molybdenum powder into a vacuum sintering furnace, raise the temperature to 1200-1600° C. at a heating rate of 50-100° C. / h, keep the temperature for 3-5 hours, and finally cool down to room temperature with the furnace to obtain a molybdenum-silicon alloy block;

[0034] S300, breaking the molybdenum-silicon alloy block into molybdenum-silicon alloy powder with an average particle size of 106-150um;

[0035] S400. Put titanium powder and molybdenum-silicon alloy powder with a pur...

Embodiment 1

[0043] The first aspect of this embodiment provides a titanium-silicon-molybdenum alloy target, which comprises the following components in mass percentage: 60at% titanium, 20a% silicon, and 20at% molybdenum.

[0044] The second aspect of this embodiment provides a method for preparing a titanium-silicon-molybdenum alloy target, including the following steps:

[0045] (1) After putting silicon powder with a purity of more than 99.5% and an average particle size of 10um and molybdenum powder with a purity of more than 99.5% and an average particle size of 6um into the high-energy ball mill, vacuumize the ball mill first, and then fill it with high-energy ball mill. Pure argon, while water-cooling the ball mill tank, mix the silicon powder and molybdenum powder in the high-energy ball mill for 12 hours, and the powder will be produced when the ball mill is completely cooled to room temperature;

[0046] (2) Put the silicon-molybdenum powder into a vacuum sintering furnace, raise...

Embodiment 2

[0056] The first aspect of this embodiment provides a titanium-silicon-molybdenum alloy target, which comprises the following components in mass percentage: 52at% titanium, 10a% silicon, and 38at% molybdenum.

[0057] The second aspect of this embodiment provides a method for preparing a titanium-silicon-molybdenum alloy target, including the following steps:

[0058] (1) After putting silicon powder with a purity of more than 99.5% and an average particle size of 5um and molybdenum powder with a purity of more than 99.5% and an average particle size of 5um into the high-energy ball mill, vacuumize the ball mill first, and then fill it with a high-energy ball mill. Pure argon, and water-cooled ball milling tank at the same time, mix silicon powder and molybdenum powder in the high-energy ball mill for 8 hours, and the powder will be produced when the ball mill is completely cooled to room temperature;

[0059] (2) Put the silicon-molybdenum powder into a vacuum sintering furna...

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Abstract

The invention discloses a titanium-silicon-molybdenum alloy target material and a preparation method thereof. The preparation method comprises mixing silicon powder and molybdenum powder in vacuum orunder the protection of high-purity argon; sintering the mixed molybdenum-silicon powder to obtain a molybdenum-silicon alloy block; crushing the molybdenum-silicon alloy block into molybdenum-siliconalloy powder; mixing the titanium powder and the molybdenum-silicon alloy powder in the vacuum or under the protection of the high-purity argon; performing cold isostatic pressing on the titanium alloy and the molybdenum-silicon alloy powder which are mixed uniformly to obtain a titanium-molybdenum-silicon alloy billet; filling the titanium-molybdenum-silicon alloy billet into a package sheath for performing degassing treatment; obtaining an alloy ingot through hot isostatic pressing sintering after the package sheath is subjected to the degassing treatment; and performing machining and cleaning on the pressed alloy ingot in sequence to obtain the titanium-silicon-molybdenum alloy target material. The titanium-silicon-molybdenum alloy target material prepared by the preparation method hasthe advantages of high density, no air pore and segregation, uniform tissue, fine crystal particles, various specifications and sizes and the like.

Description

technical field [0001] The invention belongs to the field of powder metallurgy preparation of new materials, in particular to a titanium-silicon-molybdenum alloy target and a preparation method thereof. Background technique [0002] TiN binary hard coating has been widely used in cutting and drilling tools, anti-wear parts and other fields. In recent years, with the increasingly harsh processing conditions, traditional binary hard coatings have shortcomings such as poor oxidation resistance, low hardness and poor chemical stability, which have seriously restricted the expansion of their application fields. Studies have shown that adding Si to the binary TiN coating can prevent the growth of TiN columnar crystals and form a two-phase or multi-phase mixture, which can significantly increase the microhardness of the film and improve the friction and wear properties of the coating. [0003] It is found through experiments that when the Si content is low, the wear mechanism of t...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/06C22C30/00C22C14/00C22C1/04B22F3/10B22F9/04B22F3/04B22F3/15
CPCC23C14/3407C23C14/3414C23C14/35C23C14/0641C22C14/00C22C30/00C22C1/0458C22C1/04B22F3/1007B22F9/04B22F3/04B22F3/15B22F2998/10B22F2998/00B22F2201/20B22F1/0003B22F1/054
Inventor 姜海唐培新吕晓明姜慧王瑞刚许凤志
Owner 河北宏靶科技有限公司
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