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Ultra-thick hydrogen-free diamond-like film and preparation method thereof

A diamond thin film, ultra-thick technology, applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problems of easy peeling of the film layer, poor bonding force, thin film wear, etc., to expand the scope of application, Enhanced wear resistance, good durability effect

Inactive Publication Date: 2020-03-10
EZHOU JINFENG SUPERHARD MATERIALS CO LTD
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  • Claims
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AI Technical Summary

Problems solved by technology

[0003] The sliding parts of automobile engines and transmission systems generally use fuel oil or engine oil to achieve the lubrication function. However, the combination of hydrogen-containing diamond-like carbon film and engine oil is not ideal in terms of the sustainability of the friction reduction effect, mainly due to the C-H bond in the diamond-like film. Carbon reacts with lubricating oil after being cut off due to sliding frictional heat and machinery, which accelerates the wear of the film
In addition, the diamond-like carbon film produces high internal stress during the deposition process, which makes its bonding force with the metal substrate poor, and the film layer is easy to peel and fall off, which limits the deposition thickness of the film.

Method used

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  • Ultra-thick hydrogen-free diamond-like film and preparation method thereof

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preparation example Construction

[0023] A method for preparing an ultra-thick hydrogen-free diamond-like film coating, comprising the following steps:

[0024] (1) Workpiece pretreatment. Grinding and polishing the workpiece, the surface roughness of the workpiece after grinding and polishing is Ra<0.1μm, then the workpiece is ultrasonically cleaned with pure water and alcohol, and finally the workpiece is dried and placed on the turret of the vacuum ion plating furnace cavity;

[0025] (2) Ion cleaning. After vacuuming, when the pressure in the vacuum chamber is lower than 8×10-4Pa, start the substrate turret, control the speed at 2-4rpm, pass in argon gas, perform argon ion glow cleaning, then reduce the flow rate of argon gas, and turn on the Cr metal target , carry out metal ion etching and cleaning on the workpiece, and the cleaning conditions of argon ion glow discharge are as follows: the air pressure is 2-4Pa, the substrate temperature is 300-400°C, the substrate bias voltage is -800--1000V, and the ...

Embodiment 1

[0030] The ball milled cast iron piston ring workpiece is ground and polished to a roughness of Ra=80nm, first cleaned with pure water and alcohol for 20 minutes, then dried and placed on the turntable of the vacuum ion plating furnace cavity, and a part of the elemental Cr is installed at the position of the arc target Target, a part of the installation of high-purity graphite target, close the door of the vacuum chamber. Turn on the mechanical pump, Roots pump and molecular pump in turn to evacuate the vacuum chamber to 5×10-4Pa, pass in argon gas to 2.0Pa, heat the substrate to 350°C, and apply a negative bias of -1000V to trigger glow Discharge and clean by argon ion sputtering for 20 minutes. After glow cleaning, adjust the argon flow rate, control the vacuum chamber pressure at 0.3Pa, set the substrate bias voltage to -900V, and the duty cycle to 40%, turn on the metal Cr target, and set the target arc current to 80A for metal ion etching. etch cleaning with a depositio...

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Abstract

The invention relates to an ultra-thick hydrogen-free diamond-like film and a preparation method thereof. A Cr bonding layer coats the upper part of a metal matrix, the upper part of the Cr bonding layer is provided with a C / C multilayer composite film, and the C / C multilayer composite film is formed through alternating deposition of a soft C film and a hard C film. The preparation method comprises the following steps of (1) pretreatment of a workpiece, (2) ion cleaning, (3) preparation of the Cr bonding layer, and (4) preparation of the C / C multilayer composite film. According to the film andthe preparation method thereof, the soft and hard alternating C / C multilayer film is prepared by controlling a bias voltage of the matrix by using a vacuum ion plating technology, all layers of interfaces are matched with one another, the film has good binding force and toughness, the induced effect generated by ion bombardment under high bias voltage causes a SP2 bond in the film to be transformed to a SP3 bond, and the wear resistance of the diamond-like film is enhanced. According to the homogeneous multi-layer structure, the hardness of the film is up to 40 GPa, the coefficient of friction is less than 0.15, and good durability is achieved, so that the engineering application range of the diamond-like film is expanded.

Description

technical field [0001] The invention relates to the technical field of material surface modification, in particular to an ultra-thick hydrogen-free diamond-like carbon film material prepared by a vacuum ion plating method. Background technique [0002] In order to reduce the fuel consumption of the engine, it is very important to reduce the friction of the sliding parts of the engine, especially the key components such as pistons and piston rings. For example, the piston ring group contributes up to 25% to reduce the total mechanical friction. When considering measures to optimize the tribological system of piston rings and cylinder surfaces, piston ring coatings play a pivotal role. As a high-hardness anti-friction and anti-wear surface protection film material, diamond-like film has excellent wear resistance, low friction coefficient and good synergistic compounding characteristics with engine lubricating oil. It is an important surface treatment technology for engine ener...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/02C23C14/06C23C14/16C23C14/32
CPCC23C14/022C23C14/0605C23C14/16C23C14/32
Inventor 方海严春银翁佑发
Owner EZHOU JINFENG SUPERHARD MATERIALS CO LTD
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