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Processing method of surface roughness of superhard laser crystal

A surface roughness, laser crystal technology, applied in the field of laser crystal cold processing, can solve the problems of sub-surface defects, difficult to remove, difficult to process and manufacture, etc.

Active Publication Date: 2021-07-06
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the Mohs hardness of superhard crystals and processing auxiliary materials are above 8, it is easy to produce surface and subsurface defects during the grinding and polishing process, and it is difficult to remove
Various existing techniques still cannot completely solve the effective control of the high surface roughness of slab crystal components, and it is still difficult to realize the high surface roughness processing and manufacturing of such components

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0018] A method for processing the surface roughness of a superhard laser crystal. The processing object of this embodiment is a Nd:YAG slab crystal with a specification of 128mm×6mm×6mm, and the surface roughness of 128mm×6mm is required to be less than 0.3nm. The method includes the following steps:

[0019] 1) Detect the particle size of four specifications of silicon carbide for grinding, record the maximum particle size of 180# / 240# / 320# / 500# silicon carbide, the maximum particle size of 180# silicon carbide is 100μm, and the maximum particle size of 240# silicon carbide is 70μm , 320# silicon carbide maximum particle size 50μm, 500# silicon carbide particle size 25μm;

[0020] 2) Use a single-axis machine to grind the crystal element, use 180# silicon carbide to remove 1mm, use 240# silicon carbide to remove 0.3mm, use 320# silicon carbide to remove 0.2mm, use 500# silicon carbide to remove 0.15mm , Ultrasonic cleaning, using a stylus profiler to detect the surface of th...

Embodiment 2

[0024] A method for processing the surface roughness of a superhard laser crystal. The processing object of this embodiment is a Nd:YAG slab crystal with a specification of 133mm×33mm×3mm, and the large surface roughness of 133mm×33mm is required to be less than 0.3nm. The method includes the following steps :

[0025] 1) Detect the particle size of four specifications of boron carbide for grinding, record the maximum particle size of 180# / 240# / 320# / 500# boron carbide, the maximum particle size of 180# boron carbide is 80μm, and the maximum particle size of 240# boron carbide is 63μm , 320# boron carbide maximum particle size 45μm, 500# boron carbide particle size 20μm;

[0026] 2) Use a single-axis machine to grind the crystal element, use 180# boron carbide to remove 2mm, use 240# boron carbide to remove 0.3mm, use 320# boron carbide to remove 0.2mm, use 500# boron carbide to remove 0.15mm , Ultrasonic cleaning, using a stylus profiler to detect the surface of the component...

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PUM

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Abstract

A method for processing the surface roughness of a superhard laser crystal, the method comprising the steps of grinding, rough polishing, precision ring polishing and the like. The method of the invention strictly controls the grinding amount of each process in the grinding stage through the detection of the particle size of the abrasive, and fundamentally removes subsurface defects; by adding polishing aids, the polishing liquid is more uniformly dispersed and lubricated, thereby effectively controlling the surface The generation of subsurface defects greatly improves the surface roughness of superhard laser crystals. For Nd:YAG crystals with specifications of 125mm×6mm×6mm and 133mm×33mm×3mm, the roughness of the two large surfaces reaches 0.3nm.

Description

technical field [0001] The invention relates to the field of cold processing of laser crystals, in particular to a method for processing the surface roughness of superhard laser crystals. Background technique [0002] As the core working element of high-power slab lasers, slab laser crystal elements have superior optical, mechanical and thermal performance characteristics such as high light transmittance, uniform refractive index, low laser threshold, and impact resistance, and are still the most important and applied The most widely used solid-state laser working substance is widely used in military, scientific research, medical and industrial lasers. It is the preferred laser working substance in occasions that require high power, high energy, switching and mode-locked ultrashort pulse lasers. [0003] The processing accuracy of slab laser crystal directly affects the output beam quality of the laser. With the continuous improvement of the output power requirements of the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B1/00
CPCB24B1/00
Inventor 程鑫魏朝阳邵建达曹俊
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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