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Flexible hexagonal ferrite thin film and preparation method thereof

A technology of hexagonal ferrite and thin film, applied in ion implantation plating, metal material coating process, coating, etc., can solve the problems that the preparation method has not been reported.

Active Publication Date: 2018-11-16
SUZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the preparation method of flexible hexagonal ferrite films, especially epitaxial flexible hexagonal ferrite films, has not been reported at present.

Method used

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  • Flexible hexagonal ferrite thin film and preparation method thereof
  • Flexible hexagonal ferrite thin film and preparation method thereof
  • Flexible hexagonal ferrite thin film and preparation method thereof

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preparation example Construction

[0041] ginseng figure 1 As shown, the invention discloses a preparation method of a flexible hexagonal ferrite film, which specifically includes:

[0042] S1. Prepare a hexagonal ferrite target by using hexagonal ferrite powder. Among them, the hexagonal ferrite powder includes BaCO 3 Powder and / or SrCO 3 powder, and Fe 2 o 3 powder.

[0043] Step S1 is specifically:

[0044] S11, BaCO with a purity higher than 99.95% 3 Powder and / or SrCO 3 powder, and Fe 2 o 3 The powders are weighed in proportion, mixed uniformly, ground, and then the hexagonal ferrite powder is annealed (the annealing temperature is 550°C-1100°C, the annealing time is 5-20h), and cooled naturally. Preferably, BaCO is selected as the hexagonal ferrite powder 3 and Fe 2 o 3 When BaCO 3 and Fe 2 o 3 The molar ratio is 1:5.5 to 1:6.5; when choosing SrCO 3 and Fe 2 o 3 When SrCO 3 and Fe 2 o 3 The molar ratio is 1:5.5 to 1:6.5; when BaCO is selected 3 , SrCO 3 and Fe 2 o 3 When BaCO 3 ...

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Abstract

The invention discloses a flexible hexagonal ferrite thin film and a preparation method thereof. The preparation method comprises: S1, preparing a hexagonal ferrite target material by adopting hexagonal ferrite powder; S2, providing a single crystal substrate, wherein the single crystal substrate is used as a substrate for thin film preparation; S3, carrying out epitaxial growth of a hexagonal ferrite thin film on the single crystal substrate by using vacuum coating equipment; S4, stripping the single crystal substrate by adopting a mechanical stripping method so as to obtain the flexible hexagonal ferrite thin film. According to the invention, the flexible thin film is successfully prepared by the method of growing the hexagonal ferrite thin film with height preferred orientation on the high-temperature resistant single crystal substrate by adopting a vacuum coating method and then stripping the high-temperature resistant single crystal substrate by the mechanical method; the flexiblehexagonal ferrite thin film has bendability, and after the flexible hexagonal ferrite thin film is bent, magnetism is basically not changed, and thus, the flexible hexagonal ferrite thin film has potential value for a flexible device.

Description

technical field [0001] The invention relates to the technical field of film materials, in particular to a flexible hexagonal ferrite film and a preparation method thereof. Background technique [0002] With the popularity of smart terminals. Wearable electronic devices present a huge market prospect. As one of the core components, sensors will affect the functional design and future development of wearable devices. Flexible wearable electronic sensors have the characteristics of thinness and portability, excellent electrical performance and high integration, making them one of the most concerned electrical sensors, and flexible magnetic thin films are one of the key materials for flexible wearable electronic devices. [0003] At present, metal flexible magnetic thin film materials such as CoFeB and FeGa have been prepared, but there are few reports on the preparation of flexible insulating ferrite magnetic thin film materials. Hexagonal ferrite has good chemical stability...

Claims

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Application Information

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IPC IPC(8): C23C14/08C23C14/34
CPCC23C14/0005C23C14/08C23C14/3414
Inventor 汤如俊朱齐山苏晓东
Owner SUZHOU UNIV
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