Method for full temperature range PSA (pressure swing adsorption) ammonia purification and recycling of waste gas from LED-MOCVD (metal-organic chemical vapor deposition) process
A pressure swing adsorption, full temperature range technology, applied in separation methods, chemical instruments and methods, ammonia compounds, etc.
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Embodiment 1
[0045] like figure 1 As shown, a LED-MOCVD process waste gas full-temperature pressure swing adsorption method for ammonia extraction and reuse, the specific implementation steps include:
[0046] (1) Raw material gas, that is, the exhaust gas in the process of preparing light-emitting diode (LED) based on gallium nitride (GaN) epitaxial wafer growth by MOCVD (metal oxide chemical vapor deposition) at normal pressure or low pressure, and its main composition is nitrogen (N2 ): 46% (v / v, the following are similar), hydrogen (H2): 34%, ammonia (NH3): 19%, and the remaining 1% is a small amount of metal ions, particles, arsine, methane (CH4), water (H2O), carbon monoxide (CO), carbon dioxide (CO2), oxygen (O2) and other impurity components, the pressure is normal pressure, and the temperature is 50-70°C;
[0047] (2) Pretreatment, the raw material gas is sent to the pretreatment unit composed of a dust collector, a particle removal filter, and an oil mist collector through a blo...
Embodiment 2
[0054] like figure 1 As shown, on the basis of Example 1, the raw material gas temperature is 20-30°C, and the rest remain unchanged. The high-temperature product gas produced in the ammonia gas purification process is heat-exchanged with the raw material gas to restore its temperature to 50-70°C. And carry out operation by embodiment 1. The purpose is to prevent the high concentration of ammonia in the raw gas from easily escaping into liquid at a temperature of 20°C lower than the ambient temperature and damaging the equipment in the pretreatment process.
Embodiment 3
[0056] like figure 1 As shown, on the basis of Example 1, the raw material gas temperature is 100-120°C, and the rest remains unchanged, and the normal operation can be directly carried out as in Example 1, wherein the pretreated raw material gas is pressurized to 3.0 MPa, and the medium and shallow temperature The operating pressure of the pressure swing adsorption (PSA) concentration process is 3.0MPa, and the operating temperature is 100-120°C; the adsorption waste gas from the medium temperature pressure swing adsorption (PSA) concentration process and the non-condensable gas from the condensation and freezing process are mixed first After being sent to spraying to recover part of the ammonia water, and then entering catalytic combustion and spraying treatment, it will be discharged directly after reaching the national air control emission standard; the ammonia-rich concentrated gas flowing out from the medium and shallow temperature pressure swing adsorption concentration ...
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