Low resistance monocrystalline silicon doping method
A single crystal silicon and dopant technology, applied in single crystal growth, single crystal growth, chemical instruments and methods, etc., can solve the problems of large changes in axial resistivity, waste of materials, low segregation coefficient, etc. The effect of improving the utilization rate of raw materials, improving the conversion efficiency, and simple doping process
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Embodiment 1
[0042] The low-resistance monocrystalline silicon doping method, the specific steps include the following steps:
[0043] (1) Preparatory work: Check the purity index and size of raw silicon materials, the purity of gallium-resistance materials and low-resistance boron materials;
[0044] (2) Seed crystal loading: select a seed crystal with a good crystal orientation and no mechanical damage and put it into the cleaned furnace;
[0045] (3) Preparation of low-resistance gallium-boron-silicon alloy material as a low-resistance co-dopant: use low-resistance gallium material, low-resistance boron material and a small amount of silicon to make low-resistance gallium-boron-silicon alloy material by conventional methods, wherein the low-resistance The mass ratio of gallium material and low resistance boron material is 90:10;
[0046] (4) charging: silicon material and low-resistance co-dopant are loaded into the crucible, wherein the consumption of low-resistance co-dopant is 0.05g...
Embodiment 2
[0055] The low-resistance monocrystalline silicon doping method, the specific steps include the following steps:
[0056] (1) Preparatory work: Check the purity index and size of the raw silicon material, the purity of gallium-resistance materials and low-resistance boron materials;
[0057] (2) Seed crystal loading: select a seed crystal with a good crystal orientation and no mechanical damage and put it into the cleaned furnace;
[0058] (3) Preparation of low-resistance gallium-boron-silicon alloy material as a low-resistance co-dopant: use low-resistance gallium material, low-resistance boron material and a small amount of silicon to make low-resistance gallium-boron-silicon alloy material by conventional methods, wherein the low-resistance The mass ratio of gallium material and low resistance boron material is 40:60;
[0059] (4) charging: silicon material and low-resistance co-dopant are loaded into the crucible, wherein the consumption of low-resistance co-dopant is 0....
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