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Preparation method of high-speed steel tool protective coating

A technology of protective coating and high-speed steel, applied in coating, metal material coating process, gaseous chemical plating, etc., can solve the problems of high production cost and high defect density of tool protective coating, and improve the utilization rate of raw materials , good compactness, the effect of improving the utilization rate

Active Publication Date: 2018-08-17
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

[0004] Aiming at the above defects or improvement needs of the prior art, the present invention provides a method for preparing a protective coating for high-speed steel cutting tools, the purpose of which is to combine low-temperature plasma chemical vapor deposition and plasma atomic layer deposition technologies, and to The plasma atomic layer deposition method is improved, and a composite film with a dense micron-scale thickness is prepared on the surface of the tool, thereby solving the current problem of high defect density and high production cost of the tool protective coating, and can realize the formation of a dense layer on the surface of the high-speed steel tool. Thin-film protective layer can effectively protect the surface of the tool, which can not only prevent the phase change of the tool during use, but also prevent the erosion of harmful gases such as water and oxygen during storage

Method used

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  • Preparation method of high-speed steel tool protective coating
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  • Preparation method of high-speed steel tool protective coating

Examples

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preparation example Construction

[0041] like figure 1 As shown, the preparation method of a high-speed steel tool protective coating provided by the embodiment of the present invention is used to deposit a dense composite film on the surface of the high-speed steel tool to protect it. The method includes the following steps:

[0042] S1 Pretreatment of cleaning and drying the surface of the high-speed steel tool to be protected

[0043] In the above cleaning steps, the high-speed steel tool is soaked in absolute ethanol, cleaned with a plasma cleaner, then wiped and dried with a dust-free cloth or paper, and blown dry with a nitrogen air gun.

[0044] S2 is deposited on the surface of high-speed steel cutting tools to obtain a micron-sized bottom film

[0045] The high-speed steel cutters processed by the above pretreatment steps are stored in a glove box to keep the surface clean and dry, and then transferred to a plasma-enhanced chemical vapor deposition (PECVD) chamber for plasma-enhanced chemical vapor d...

Embodiment 1

[0077] In this embodiment, a protective coating is prepared on the surface of a typical high-speed steel cutting tool, and a silicon wafer is used for a comparative experiment.

[0078] First, a silicon nitride film with a thickness of 5 μm was deposited by plasma chemical vapor deposition at a deposition temperature of 80 °C, and the two precursors introduced were SiH 4 , NH 3 , the chemical reaction equation for preparing silicon nitride film is:

[0079]

[0080]

[0081] And the overall reaction equation is:

[0082]

[0083] Then, after the silicon nitride film was prepared, a layer of aluminum oxide film with a thickness of 20nm was deposited on the silicon nitride film by plasma-enhanced atomic layer deposition, the deposition temperature was 80°C, and the three precursors introduced were Al( CH 3 ) 3 , O 2 and H 2 O.

[0084] The chemical reaction equation for preparing aluminum oxide film is:

[0085] AlOH * +Al(CH 3 ) 3 →Al-O-(CH 3 ) 2 +CH 4

...

Embodiment 2

[0097] The knives are easily eroded by various gases during storage, such as water vapor in the air. The invention uses a composite film layer to protect the OLED device with an area of ​​5cm×5cm. The lighting state of the OLED device can be used to observe the knife more intuitively. The barrier effect of the encapsulation layer and the defect failure site can prove that the encapsulation film has good water vapor barrier ability.

[0098] A silicon nitride layer with a thickness of 1 μm + an aluminum oxide film with a thickness of 50 nm was prepared on the surface of an OLED device by using the preparation method of the present invention, and the reaction equation was the same as that in Example 1. After the reaction is completed, the device is placed in an environment of 60°C and 90% relative humidity for aging test. The test comparison diagram is as follows Figure 4 shown. in, Figure 4 a) is the lighting state diagram of the initial state of the OLED device, Figure 4...

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Abstract

The invention belongs to the field of film preparation, and particularly discloses a preparation method of a high-speed steel tool protective coating. The preparation method comprises the steps that the surface of a tool is pretreated, and the tool is placed in plasma enhanced chemical vapor deposition equipment and is deposited with a micron-sized inorganic film; the tool is placed in plasma enhanced atomic layer deposition equipment, and on the conditions of a proper temperature, pressure and proper plasma power, different precursors are alternately supplied, so that saturation adsorption issequentially formed on the surface of the tool and chemical reaction is completed; and finally a composite coating is subjected to annealing treatment. Through a nano-scale film formed by plasma atomic layer deposition, the surface defects of a chemical vapor deposition film can be reduced effectively, and then effective protection on the tool in machining and storage states is realized. Preparation of the tool surface protective coating can be realized by utilizing a chemical vapor deposition means on a cold condition, and then the effective protection on the tool is realized.

Description

technical field [0001] The invention belongs to the field of film preparation, and more specifically relates to a preparation method of a high-speed steel tool protective coating. Background technique [0002] High-speed steel is a tool steel with high hardness, high wear resistance and high heat resistance, and has a wide range of applications in machine tool processing, mold forming and other fields. However, when it is in a high-speed cutting state, the sharp rise in cutting temperature will easily lead to phase transformation of the tool material, causing the tool to wear rapidly. In addition, when the high-speed steel tool is not in use, how to effectively protect it from being corroded by various corrosive gases such as water vapor and oxygen in the air is of great significance to prolong the life of the tool. [0003] The traditional tool surface protection method is to use magnetron sputtering, evaporation, ion plating and other methods to prepare a superhard coatin...

Claims

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Application Information

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IPC IPC(8): C23C16/34C23C16/40C23C16/455C23C16/50C23C16/56
CPCC23C16/303C23C16/34C23C16/345C23C16/402C23C16/403C23C16/4554C23C16/45553C23C16/45555C23C16/50C23C16/56
Inventor 陈蓉李云单斌曹坤刘媛媛杨惠之
Owner HUAZHONG UNIV OF SCI & TECH
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