Preparation method of molybdenum disulfide nanotubes
A technology of molybdenum disulfide and nanotubes, which is applied in the field of semiconductor nanotube preparation, can solve problems such as uncontrollable size of molybdenum sulfide nanotubes, influence of electronic applications, complex chemical reactions, etc., and is conducive to large-scale industrial production and widely used Strong applicability and size controllability
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Embodiment 1
[0018] A preparation method for molybdenum disulfide nanotubes, comprising the following processing steps:
[0019] 1) Spread 5g of molybdenum hexacarbonyl on the bottom of a ceramic crucible, place a porous anodized aluminum template with a pore diameter of 40nm downwards on top of the molybdenum hexacarbonyl, seal the crucible and place it in a vacuum tube furnace, and feed in 100 SCCM of nitrogen Purge air from furnace tubes. Under the protection of nitrogen at 100SCCM, raise the temperature to 100°C and keep it for 60 minutes, then continue to raise the temperature to 300°C and keep it for 40 minutes to get molybdenum metal deposition, stop heating;
[0020] 2) After the vacuum tube furnace in step 1) is lowered to room temperature, take out the porous anodized aluminum template, place its opening downwards in a ceramic crucible filled with sulfur powder, seal the crucible and place it in a vacuum tube furnace. Under the protection of 100SCCM nitrogen, raise the temperatu...
Embodiment 2
[0023] A preparation method for molybdenum disulfide nanotubes, comprising the following processing steps:
[0024] 1) Spread 5g of molybdenum hexacarbonyl on the bottom of a ceramic crucible, place a porous anodized aluminum template with a pore size of 10nm downwards on top of the molybdenum hexacarbonyl, seal the crucible and place it in a vacuum tube furnace, and inject 100 SCCM of nitrogen Purge air from furnace tubes. Under the protection of nitrogen at 100SCCM, raise the temperature to 50°C and keep it for 200 minutes, then continue to raise the temperature to 300°C and keep it for 40 minutes to obtain metal molybdenum deposition, stop heating;
[0025] 2) After the vacuum tube furnace in step 1) is lowered to room temperature, take out the porous anodized aluminum template, place its opening downwards in a ceramic crucible filled with sulfur powder, seal the crucible and place it in a vacuum tube furnace. Under the protection of 100SCCM nitrogen, raise the temperature...
Embodiment 3
[0028] A preparation method for molybdenum disulfide nanotubes, comprising the following processing steps:
[0029] 1) Spread 5g of molybdenum hexacarbonyl on the bottom of a ceramic crucible, place a porous anodized aluminum template with a pore diameter of 40nm downwards on top of the molybdenum hexacarbonyl, seal the crucible and place it in a vacuum tube furnace, and feed in 100 SCCM of nitrogen Purge air from furnace tubes. Under the protection of nitrogen at 100SCCM, raise the temperature to 150°C and keep it for 30 minutes, then continue to raise the temperature to 300°C and keep it for 40 minutes to get metal molybdenum deposition, stop heating;
[0030] 2) After the vacuum tube furnace in step 1) is lowered to room temperature, take out the porous anodized aluminum template, place its opening downwards in a ceramic crucible filled with sulfur powder, seal the crucible and place it in a vacuum tube furnace. Under the protection of 100SCCM nitrogen, raise the temperatu...
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