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Aluminum-based molybdenum disulfide target material capable of obtaining solid-state high lubricating film layer on surface of metal material and preparation method of aluminum-based molybdenum disulfide target material

A technology of aluminum-based molybdenum disulfide and molybdenum disulfide, which is applied in metal material coating process, coating, ion implantation plating, etc. Density and other issues, to achieve the effect of improving service life, good bonding force, and short process flow

Active Publication Date: 2018-05-08
HUNAN HYDRO DYNAMIC NEW MATERIAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, in the process of preparing metal and alloy targets, due to the differences in the properties of elements, some specific types and components of targets need special preparation processes to obtain, otherwise it is difficult to meet the requirements of the coating on the purity, microstructure and toxicity of the target. The requirements of characteristics such as density cannot realize the application of sputtering coating

Method used

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  • Aluminum-based molybdenum disulfide target material capable of obtaining solid-state high lubricating film layer on surface of metal material and preparation method of aluminum-based molybdenum disulfide target material
  • Aluminum-based molybdenum disulfide target material capable of obtaining solid-state high lubricating film layer on surface of metal material and preparation method of aluminum-based molybdenum disulfide target material

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0054] The content of aluminum in the alloy of the invention is 60wt%, that of titanium is 39wt%, and that of molybdenum disulfide is 1wt%.

[0055] The average particle size of aluminum powder is 10 μm; the average particle size of titanium powder is 30 μm; the average particle size of molybdenum disulfide powder is 1 μm.

[0056] The purity of all metal powders is guaranteed to be above 99%.

[0057] Weigh aluminum powder, titanium powder and molybdenum disulfide powder according to the distribution ratio of the target material, mix them in a three-dimensional mixer for 2 hours, and fill the mixing cylinder with argon protection; put the evenly mixed powder in a mold, and Place them together in a vacuum hot press, and add argon for protection after vacuuming. Raise the temperature from room temperature to 300°C, keep the temperature for 20 minutes, and keep the pressure at 30MPa; then continue to raise the temperature to 600°C for 10 minutes, keep the pressure at 20MPa; con...

Embodiment 2

[0061] The content of aluminum in the alloy of the invention is 30wt%, that of titanium is 60wt%, and that of molybdenum disulfide is 10wt%.

[0062] The average particle size of aluminum powder is 30 μm; the average particle size of titanium powder is 70 μm; the average particle size of molybdenum disulfide powder is 15 μm.

[0063] The purity of all metal powders is guaranteed to be above 99%.

[0064] Weigh aluminum powder, titanium powder and molybdenum disulfide powder according to the distribution ratio of the target material, mix them in a three-dimensional mixer for 6 hours, and fill the mixing cylinder with argon protection; put the evenly mixed powder in a mold, and Place them together in a vacuum hot press and add argon for protection. Start heating from room temperature to 400°C, keep the temperature for 30 minutes, and keep the pressure at 40MPa; then continue to raise the temperature to 700°C and keep the temperature for 30 minutes, and keep the pressure at 60MP...

Embodiment 3

[0068] The aluminum content is 52 wt%, the titanium content is 43 wt%, and the molybdenum disulfide content is 5 wt%.

[0069] The average particle size of aluminum powder is 20 μm; the average particle size of titanium powder is 45 μm; the average particle size of tungsten powder is 10 μm.

[0070] All metal powders are above 99.9% pure.

[0071] Weigh aluminum powder, titanium powder and tungsten powder according to the target alloy ratio, mix them in a three-dimensional mixer for 4 hours, and fill the mixing cylinder with argon gas for protection. Put the uniformly mixed powder in a mold, place it together with the mold in a vacuum hot press, and add argon for protection after vacuuming. Raise the temperature from room temperature to 350°C, keep the temperature for 25 minutes, and keep the pressure at 35MPa; then continue to raise the temperature to 650°C for 20 minutes, keep the pressure at 40MPa; continue to raise the temperature to 900°C, keep the temperature for 15 min...

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Abstract

The invention relates to an aluminum-based molybdenum disulfide target material capable of obtaining a solid-state high lubricating film layer on the surface of a metal material and a preparation method of the aluminum-based molybdenum disulfide target material. The aluminum-based molybdenum disulfide target material is prepared from following raw materials including, by mass percent, 30%-60% of aluminum, 30%-60% of titanium and 1%-10% of molybdenum disulfide. A method for powder hot-pressing sintering and vacuum heat treatment of the aluminum-based molybdenum disulfide target material is further included. The target material prepared under the combined action of temperature and pressure is high in density; in the film coating process of the target material, the friction coefficient of thefilm layer can be reduced and is 0.2 or below, and even under the conditions of the humidity being 40% and the low loads, the friction coefficient is smaller than 0.1 and reaches the range of 0.05-0.08; and the binding force of the film layer and a base material is good, and the service life of a coating can be prolonged.

Description

technical field [0001] The invention relates to an aluminum-based molybdenum disulfide target which obtains a solid high-lubricating film layer on the surface of a metal material and a preparation method thereof, belonging to the related technical fields of powder metallurgy and vacuum coating. Background technique [0002] The surface of metal materials produces friction and wear under service conditions, which is easy to cause damage and failure of materials. Preparing a layer of high lubricity film on the surface of the material can effectively reduce the friction loss of metal materials, especially the solid high lubricity film on the surface of some commonly used knives, tools and molds can greatly improve its service life and increase Precision. Therefore, the preparation of high lubricity film layer has become an effective method for surface modification of metal materials. [0003] Different surface modification techniques are used to improve the surface lubricity ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C23C14/06C22C21/00C22C32/00C22C14/00
CPCC22C14/00C22C21/003C22C32/0089C23C14/0688C23C14/3407C23C14/3414
Inventor 余琨
Owner HUNAN HYDRO DYNAMIC NEW MATERIAL CO LTD
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