Method for directly writing magneto-optic waveguide on diamagnetic photosensitive glass by using femtosecond laser

Abstract

The invention discloses a method for directly writing a magneto-optic waveguide on diamagnetic photosensitive glass by using femtosecond laser. A micro channel pattern is drawn and imported through software, and a 40X objective lens and a 520-micron slit are used to focus laser in a direction orthogonal to the surface of well-polished glass and the transmission of a laser beam. Scanning is repeated 4-12 times at the repetition rate of 100kHz, at the power of 0.1-0.5W and at the current of 21-25A, and the depth of irradiation is 170 microns. A magneto-optic waveguide can be obtained through movement at the pulse energy of 150-350nJ and at the speed of 1.5mm / min according to a set scanning pattern. After ultrasonic concussion cleaning, annealing is carried out for 2 hours at 260-290 DEG C. The magneto-optic waveguide obtained is 150-500 microns wide, and the refractive index increases by 3-9*10<-2>. The method provides a carrier with good magneto-optical property for the magneto-optic waveguide, reduces the complexity of the magneto-optical waveguide structure, and improves the sensitivity and speed of magnetic field response of devices. The method is simple and nontoxic, consumes less energy, and has a wide range of application.

Description

technical field [0001] The invention relates to an optical device prepared by a femtosecond laser, in particular to the technical field of a magneto-optic photosensitive glass-based magneto-optical waveguide chip. Background technique [0002] Driven by the demand from magneto-optical isolators and various sensor applications based on the principle of magnetic field sensing, the integration of magneto-optic functions on integrated optical chips has become a new research hotspot. Integrated magneto-optic devices on glass substrates It has also received great attention. The manufacture of magneto-optical waveguides is the basis for constructing magneto-optic functional integration, and it is also the core problem that must be solved to realize magneto-optical functional integration. [0003] At present, the manufacture of glass-based magneto-optical waveguides is mainly to form a waveguide region on a glass substrate by ion exchange or laser writing technology, and then depos...

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Problems solved by technology

[0005] However, at present, femtosecond lasers are traditionally used to fabricate waveguides with magneto-optical functions on silicate paramagnetic glass doped with rare earth terbium. properties, and with the doping of rare earth ions, the thermal and chemical stability of the glass will be reduced, which will have an adverse effect on the waveguide performance, and cannot be used in outdoor or harsh environments

In addition, rare earths are expensive, and the solubility of rare earths in silicate glass is limited. Researchers generally use high doping rare earth content to obtain high magneto-optical properties, but high rare earth content has a negative effect on the thermal properties, mechanical properties and even chemical properties of paramagnetic glass. At the price of sacrifice, the magneto-optical glass system is not conducive to the application of devices such as magneto-optic waveguides

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