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A high density tib 2 Preparation method of ceramic target

A ceramic target material and dense technology, applied in the field of materials, can solve the problems of high cost, poor mechanical properties, complex process, etc.

Active Publication Date: 2020-07-07
北京安泰六九新材料科技有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the document "Ceramic cathodes for arc-physical vapor deposition: development and application", O. Knotek, Surface and coatings technology, 49(1991) 263-267, the author submitted to TiB 2 Add no more than 1wt% of aluminum and nickel metal additives and boron and carbon non-metallic additives to the powder, and adopt the cold pressing-sintering-hot isostatic pressing process to obtain a high-density target; but the compressed target remains Stress, poor mechanical properties, and the HIP process is complicated and costly

Method used

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  • A high density tib <sub>2</sub> Preparation method of ceramic target
  • A high density tib <sub>2</sub> Preparation method of ceramic target
  • A high density tib <sub>2</sub> Preparation method of ceramic target

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] The preparation method provided by the invention is used to prepare high-density TiB with a size of 135mm×135mm×10mm 2 Ceramic target, the specific steps are as follows:

[0040] (1) Using the above-mentioned purity TiB 2 Alloy powder, the particle size range is 2-40μm; firstly dry it in a vacuum drying oven at a drying temperature of 120°C and a holding time of 120min, then pass the above powder through a 200-mesh vibrating sieve to remove agglomerates and agglomerated phases, and take the sieve TiB with loose, uniform particle size distribution and average particle size D50=20.96μm was obtained from the following 2 powder;

[0041] (2) TiB obtained in step (1) 2 The powder is evenly filled in the graphite mold, and the initial pressure is 12MPa at the furnace temperature, and the vacuum is evacuated to 8Pa; then the temperature is raised to 700°C at a heating rate of 20°C / min and kept for 60min; Simultaneously pressurize linearly to 25MPa, heat and hold pressure f...

Embodiment 2

[0044] The preparation method provided by the invention is used to prepare high-density TiB with a size of 135mm×135mm×10mm 2 Ceramic target, the specific steps are as follows:

[0045] (1) Using the above-mentioned purity TiB 2 Alloy powder, the particle size range is 1-25μm; firstly dry it in a vacuum drying oven at a temperature of 120°C and a holding time of 120 minutes, then pass the above powder through a 200-mesh vibrating sieve to remove agglomerates and agglomerated phases to obtain the average particle size D50 = 8.92μm TiB 2 Alloy powder.

[0046] (2) TiB obtained in step (1) 2 The powder is evenly filled in the graphite mold, the initial pressure is 15MPa at the furnace temperature, and the vacuum is evacuated to 8Pa; then hot-pressed and sintered, and then cooled and demolded to obtain TiB with the above size 2 billet. The hot pressing sintering system in this example is as follows: firstly, the temperature is raised from the initial furnace temperature (usua...

Embodiment 3

[0049] The preparation method provided by the invention is used to prepare high-density TiB with a size of 135mm×135mm×10mm 2 Ceramic target, the specific steps are as follows:

[0050] (1) Using the above-mentioned purity TiB 2 Alloy powder, the particle size range is 1-16μm; firstly, it is dried in a vacuum drying oven at a drying temperature of 120°C and a holding time of 120 minutes, and then the above powder is passed through a 200-mesh vibrating sieve to remove agglomerates and agglomerated phases to obtain the average particle size D50 = 2.32μm TiB 2 Alloy powder.

[0051] (2) TiB obtained in step (1) 2 The powder is evenly filled in the graphite mold, the initial pressure is 14MPa at the furnace temperature, the vacuum is evacuated to 8Pa, and then hot-pressed and sintered, and then cooled and demolded to obtain the above-mentioned high-density TiB 2 Ceramic target. The hot pressing sintering system in this example is as follows: first, the initial furnace tempera...

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Abstract

The invention relates to a preparation method for a high-density TiB2 ceramic target material, wherein the preparation method includes the following steps: step one, drying and sieving a TiB2 raw material powder, to obtain a TiB2 powder having uniform particle size distribution and no caking; and step two, evenly filling a mould with the TiB2 powder, carrying out hot pressing sintering in a vacuumcondition, then cooling, and demoulding, to obtain the high-density TiB2 ceramic target material. According to the method, no any sintering aid is added, the powder is compressed by using the hot pressing process subsequently, the technological process is simplified, the production cycle is shortened, and the mass production can be achieved; the prepared TiB2 target material has the purity of more than or equal to 99.8%, the optimal average grain size reaching less than or equal to 2 [mu]m and the density reaching up to 99.6%; and the target material has a structure of single TiB2 phase, no alloy phase or harmful grain boundary is formed, the arc-starting electro-discharge phenomenon in a sputtering process is improved, and a prepared film layer has the advantages of high density, fewer surface defects and better sputtering effect.

Description

technical field [0001] The invention relates to a high-density TiB 2 The preparation method of a ceramic target belongs to the technical field of materials, and no sintering aid is added to the target. Background technique [0002] With the development of modern manufacturing industry, the application of hard coating tools is becoming more and more extensive. Coating superhard thin film materials on the surface of metal cutting tools can improve the cutting speed and wear resistance of the tool and prolong the service life of the tool. The machining problems of many materials have been solved. But there are still problems with the processing of some materials, such as aluminum alloys. [0003] During the machining of aluminum, material particles can adhere to the tool tip, so the tool has to use greater force to remove material from the workpiece, accelerated wear, and the tool tip often breaks prematurely. but with TiB 2 Coated tools will not, TiB 2 Very hard and non-r...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/58C04B35/622C04B35/645C04B35/626
CPCC04B35/58071C04B35/622C04B35/62605C04B35/645C04B2235/5436C04B2235/656C04B2235/6562C04B2235/6581C04B2235/77C04B2235/78
Inventor 张凤戈张欠男梁俊才李建奎魏铁峰
Owner 北京安泰六九新材料科技有限公司
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