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Manufacturing technology of Wolter-I type precision core shaft

A manufacturing process and mandrel technology, which is applied in the field of machining Wolter-I type precision mandrels with 2-axis machine tools, can solve the problems of high manufacturing cost and difficult processing of high-precision Wolter-I type mandrels, etc., and improve the surface profile shape. The effect of precision, reduction of total machining allowance, and reduction of manufacturing cost

Active Publication Date: 2018-01-12
HARBIN INST OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Aiming at the problems of difficult processing and high manufacturing cost of high-precision Wolter-I type mandrels, the present invention improves and optimizes the process, and provides a manufacturing process of Wolter-I type precision mandrels, using a 2-axis machine tool to process the mandrels , to solve the problem of high manufacturing cost

Method used

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  • Manufacturing technology of Wolter-I type precision core shaft
  • Manufacturing technology of Wolter-I type precision core shaft
  • Manufacturing technology of Wolter-I type precision core shaft

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[0044] Taking the Woler-I mandrel composed of ellipsoidal surface and hyperboloid as an example for actual processing, it has undergone rough turning (measurement), electroless nickel-phosphorus alloy plating, fine turning (measurement), automatic polishing (measurement) and manual correction polishing. Manufactured with the largest caliber Φ The mandrel is 170.81mm, and the measured surface roughness of the sample is RMS1.56nm, which can meet the application requirements of extreme ultraviolet light with a wavelength below 100nm.

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Abstract

The invention discloses a manufacturing technology of a Wolter-I type precision core shaft. The technology process comprises the following steps: acquiring an aluminum alloy round bar material blank,performing two-step core shaft blank rough turning, performing measuring, performing chemical plating of an nickel-phosphorus alloy on the surface of a core shaft, performing low-cost precise turningon the core shaft, performing measuring, performing low-cost automatic polishing on the core shaft, performing measuring, performing manually-corrected polishing on the core shaft, performing measuring and finishing the core shaft. According to the manufacturing technology of the Wolter-I type precision core shaft, in the process of manufacturing technology of a Wolter-I type reflector, in order to guarantee the precision of a machining contour, a method that a tool center moves along an equidistant line of a to-be-machined track is adopted in manufacturing of the optical core shaft for copying, the turning and polishing process of the optical core shaft is completed in an X-and-Z two-axis computer numerical control machine tool, thus the shape precision of the surface contour of the coreshaft after turning and polishing is improved, equipment cost and machining cost for turning, grinding and polishing by using a multi-axis computer numerical control machine tool with more than threeaxes are reduced, and therefore, the manufacturing cost of the optical core shaft for copying and the Wolter-I type reflector is reduced.

Description

technical field [0001] The invention belongs to the technical field of optics and precision manufacturing, and relates to a manufacturing process of a precision mandrel, in particular to a process for processing a Wolter-I type precision mandrel with a 2-axis machine tool. Background technique [0002] Since the wavelengths of extreme ultraviolet light, soft X-rays and hard X-rays are very short, the refractive index in the medium is close to 1, so they cannot be focused by refraction, and reflective optical systems must be used to focus them. However, this short-wavelength light is easily absorbed by surrounding substances or directly penetrates most substances, and its light reflectivity for most substances is extremely low. However, the refractive index of this kind of light in ordinary substances is slightly less than 1, so when the light enters the reflecting substance from a vacuum, when the incident angle is close to 90 degrees, total reflection can occur. Using this...

Claims

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Application Information

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IPC IPC(8): B23P15/00
Inventor 孔繁星孙涛王骐
Owner HARBIN INST OF TECH
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