A manufacturing process of wolter-i precision mandrel
A manufacturing process and mandrel technology, which is applied in the field of machining Wolter-I type precision mandrels with 2-axis machine tools, can solve the problems of high manufacturing cost and difficult processing of high-precision Wolter-I type mandrels, etc., and improve the surface profile shape. The effect of precision, reduction of total machining allowance, and reduction of manufacturing cost
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[0044] Taking the Woler-I mandrel composed of ellipsoidal surface and hyperboloid as an example for actual processing, it has undergone rough turning (measurement), electroless nickel-phosphorus alloy plating, fine turning (measurement), automatic polishing (measurement) and manual correction polishing. Manufactured with the largest caliber Φ The mandrel is 170.81mm, and the measured surface roughness of the sample is RMS1.56nm, which can meet the application requirements of extreme ultraviolet light with a wavelength below 100nm.
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