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A kind of method of ito waste target recovery powder preparation ito target material

A powder preparation and target material technology, which is applied in the field of ITO target material recovery from powder recovery by ITO waste target gasification method, can solve the problem of uneven particle size of ITO powder, low particle size uniformity and low sintering activity, and no preparation of ITO target. In order to achieve good solid solution effect, ensure the density of the target material, and ensure the quality of sintering

Active Publication Date: 2020-08-28
725TH RES INST OF CHINA SHIPBUILDING INDAL CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the influence of condensation conditions, the particle size of recovered ITO powder is different, the particle size uniformity and sintering activity are low, and it has its unique properties in the process of forming and sintering the target.
If the powder is prepared according to the conventional method, the density of the ITO target obtained after sintering is difficult to meet the requirements
Due to the characteristics of the powder recovered by the above-mentioned gasification method, there is no process for preparing ITO targets from the ITO powder recovered by the gasification method in the prior art.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] Take 10.00 kg of ITO recovery powder with a tin oxide content of 10.3%, put it into a planetary mill, add 0.30 kg of indium oxide powder, 10.30 kg of polyurethane balls and 10.00 kg of distilled water, and finally add polyethylene glycol for ball milling for 35 hours. The ball-milled slurry is dried with a spray dryer, the inlet air temperature is 200, the outlet air temperature is 110, and the feed rate is 15 kg / h. The dried powder is put into a mold for pressing. The first stage of pressure: 20 MP, hold for 30 seconds; the second stage of pressure: 50 MP, hold for 30 seconds; the third stage of pressure: 80 MP, hold for 100 seconds; the pressure release time is 120 seconds; The blank is vacuum packed, and then subjected to cold isostatic pressing: the first stage: 130 MP, holding pressure for 250 seconds; the second stage: 200 MP, holding pressure for 130 seconds; the third stage: 250 MP, holding pressure for 80 seconds; The time is 300 seconds.

[0033] The pressed...

Embodiment 2

[0035] Take 98.50kg of ITO recovery powder with a tin oxide content of 10%, put it into a planetary mill, add 0.90Kg of indium oxide powder and 0.10Kg of tin oxide powder, 103.20kg of polyurethane grinding balls and 100.00kg of distilled water, and finally add polyethylene The diols were ball milled for 40 hours. The ball-milled slurry is dried with a spray dryer, the inlet air temperature is 200, the outlet air temperature is 100, and the feed rate is 19 kg / h. The dried powder is put into a mold for pressing. The first stage of pressure: 25 MP, hold for 30 seconds; the second stage of pressure: 40 MP, hold for 40 seconds; the third stage of pressure: 80 MP, hold for 110 seconds; the pressure release time is 120 seconds; The green body is vacuum-packed and then subjected to cold isostatic pressing: the first stage: 150 MP, holding pressure for 250 seconds; the second stage: 220 MP, holding pressure for 120 seconds; the third stage: 280, holding pressure for 60 seconds; the pr...

Embodiment 3

[0038] Take 30kg of ITO recovery powder with a tin oxide content of 9.7%, put it into a planetary mill, add 0.09Kg of indium oxide powder and 0.11Kg of tin oxide powder (of which 0.1Kg of tin oxide powder is the calculated value of the formula), and 30kg of polyurethane mill Ball and 25kg distilled water, finally add polyethylene glycol and carry out ball milling for 30 hours. The ball-milled slurry is dried with a spray dryer, the inlet air temperature is 200, the outlet air temperature is 100, and the feed rate is 20 kg / h. The dried powder is put into a mold for pressing. The first stage pressure: 30MP, hold pressure for 20 seconds; the second stage pressure: 45 MP, hold pressure for 35 seconds; the third stage pressure: 60MP, hold pressure for 120 seconds; the pressure release time is 150 seconds; Vacuum packaging, and then cold isostatic pressing: first stage: 180MP, hold pressure for 300 seconds; second stage: 210MP, hold pressure for 180 seconds; third stage: 260, hold ...

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PUM

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Abstract

The invention discloses a method for recycling powder from ITO (indium tin oxide) waste targets for preparing ITO target materials. The method includes adding tin oxide and / or indium oxide powder into gasified recycled ITO powder and distributing the tin oxide and / or the indium oxide powder in the ITO powder; adding water and dispersing agents into mixed powder, carrying out ball-milling on the water, the dispersing agents and the mixed powder to obtain mixtures, then carrying out spray-drying on the mixtures, placing the mixtures in molds, pressurizing the mixtures step by step at stages, compressing the mixtures to obtain initial blanks in such a manner that pressures are kept for certain time after being boosted in each procedure, then boosting the pressures step by step at stages, preparing blanks by means of cold isostatic pressing in such a manner that the pressures are kept for certain time after being boosted in each procedure, carrying out heat-insulation degreasing on the prepared blanks and then burning the blanks in oxygen atmosphere to obtain the ITO target materials. The gasified recycled ITO powder is used as a raw material, the weights of the tin oxide and / or the indium oxide powder are not lower than 5% of the weight of the raw material, and the tin oxide and / or the indium oxide powder are used as sintering activity enhancers. The method has the advantages that the added powder is distributed in the recycled ITO powder, accordingly, the sintering activity of the mixed powder can be integrally improved, and characteristics of the mixed powder in forming and sintering procedures can be changed; the blanks are pressurized step by step at stages in forming procedures and are high in density, and accordingly the relative density of the ITO target materials can reach 99.5% at least.

Description

technical field [0001] The invention relates to a method for preparing an ITO target material, in particular to a method for preparing an ITO target material by recovering powder by using an ITO waste target gasification method. Background technique [0002] ITO (Tin-doped Indium Oxide) target belongs to indium-tin composite oxide ceramics, which is an important photoelectric functional material. It is often used as a magnetron sputtering target to prepare transparent conductive films on glass, plastic and other substrate materials for Production of LCD monitors, touch screens and other flat panel display devices. When the ITO target is used in the field of flat panel display, the utilization rate of its sputtering coating is generally only 30-40%, and the remaining 60-70% is waste target. The recycling of ITO waste targets is an important link in the ITO industry chain, which can greatly improve the market competitiveness of ITO target products. [0003] The recycling of ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/01C04B35/622C04B35/64C23C14/35B28B3/00
CPCB28B3/003C04B35/01C04B35/62204C04B35/64C04B2235/3286C04B2235/3293C04B2235/6562C04B2235/6567C04B2235/6583C04B2235/77C23C14/3414C23C14/35
Inventor 李龙腾刘冠鹏
Owner 725TH RES INST OF CHINA SHIPBUILDING INDAL CORP
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