Preparation method of tool surface coating and prepared coating
A surface coating and coating technology, applied in the direction of coating, superimposed layer plating, metal material coating process, etc., can solve the problems of insufficient hardness of DLC coating, reduced tool life, high coating hardness, etc., to achieve Small friction coefficient, reduced friction, uniform surface effect
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Embodiment 1
[0031] A preparation method for a CrN-CrAlSiN-DLC coating on the surface of a cemented carbide blade, comprising the steps of:
[0032] 1. Cleaning and drying of the carbide insert substrate
[0033] The surface of the blade substrate is polished to a roughness value of Ra=0.05 μm, then cleaned by an ultrasonic cleaner, and then dried in a constant temperature drying oven at a temperature of 120°C.
[0034] 2. Cleaning of carbide insert substrate
[0035] The blade substrate is placed in the magnetron sputtering chamber, and the air pressure is pumped to 6×10 -5 After being under Pa, the substrate is heated to a suitable temperature, and then argon gas is passed through, and a bias voltage of 220V is applied under a pressure of 3Pa, and the tool substrate is cleaned by argon ions for 20 minutes.
[0036] 3. Sputtered CrN coating
[0037] Argon gas was introduced into the magnetron sputtering chamber, the pressure was 2.5Pa, a bias voltage of 220V was applied, the sputtering...
Embodiment 2
[0053] A preparation method for a CrN-CrAlSiN-DLC coating on a tool surface, comprising the steps of:
[0054] 1. Cleaning and drying of the carbide insert substrate
[0055] The surface of the tool substrate is polished to a roughness value of Ra=0.05 μm, then cleaned by an ultrasonic cleaner, and then dried in a constant temperature drying oven at a temperature of 180°C.
[0056] 2. Cleaning of carbide tool substrates
[0057] The tool substrate is placed in the magnetron sputtering chamber, and the air pressure is pumped to 6×10 -5 After being under Pa, the substrate is heated to a suitable temperature, and then argon gas is passed through, and a bias voltage of 210V is applied under a pressure of 2Pa, and the tool substrate is cleaned by argon ions for 25 minutes.
[0058] 3. Sputtered CrN coating
[0059] Argon gas was introduced into the magnetron sputtering chamber, the pressure was 2.5Pa, a bias voltage of 220V was applied, the target was made of CrN alloy, and the ...
Embodiment 3
[0067] A preparation method for a CrN-CrAlSiN-DLC coating on a tool surface, comprising the steps of:
[0068] 1. Cleaning and drying of the carbide insert substrate
[0069] The surface of the tool substrate is polished to a roughness value of Ra=0.06 μm, then cleaned by an ultrasonic cleaner, and then dried in a constant temperature drying oven at a temperature of 200°C.
[0070] 2. Cleaning of carbide tool substrates
[0071] The tool substrate is placed in the magnetron sputtering chamber, and the air pressure is pumped to 6×10 -5 After being lowered to Pa, the substrate is heated to a suitable temperature, and then argon gas is passed through, and a bias voltage of 200V is applied under a pressure of 3Pa, and the tool substrate is cleaned by argon ions for 20 minutes.
[0072] 3. Sputtered CrN coating
[0073] Argon gas was introduced into the magnetron sputtering chamber, the pressure was 2.0Pa, a bias voltage of 220V was applied, the target was made of CrN alloy, and...
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