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A kind of water-soluble polymer coated special-shaped silica sol, preparation method and application

A water-soluble polymer and silica sol technology, which is applied in chemical instruments and methods, other chemical processes, polishing compositions containing abrasives, etc., can solve the problems of high surface roughness and low polishing rate, and improve surface smoothness Degree, improve the effect of polishing removal rate

Active Publication Date: 2018-07-13
HEBEI UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The polishing liquid with silica sol as abrasive mainly has the problems of low polishing rate and high surface roughness in the process of polishing sapphire.
The abrasives used are also spherical abrasives, and there is no report on the use of water-soluble polymer-coated special-shaped silica sol as abrasives

Method used

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  • A kind of water-soluble polymer coated special-shaped silica sol, preparation method and application
  • A kind of water-soluble polymer coated special-shaped silica sol, preparation method and application

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] The weight percentage of the raw materials of the water-soluble polymer-coated special-shaped silica sol in this embodiment consists of:

[0040] A, polypolyol, 0.01g, molecular weight is between 200-400; Described polypolyol is polyethylene glycol;

[0041] b. Water-soluble polymer, 0.01g, molecular weight between 10000-10200; the water-soluble polymer is polyacrylamide;

[0042]C, silica sol raw material, 20g; The average particle diameter of described silica sol raw material is 55nm, and solid content is 5wt%, and the transmission electron microscope photo of this silica sol raw material is as follows figure 1 shown;

[0043] d. The balance is deionized water.

[0044] The preparation process is as follows:

[0045] 1) under 150rpm rotation speed stirring, polypolyol and water-soluble polymer solid powder are respectively completely dissolved in deionized water, respectively to obtain polypolyol and water-soluble polymer aqueous solution;

[0046] 2) Add the sili...

Embodiment 2

[0061] The weight percentage of the raw materials of the water-soluble polymer coated special-shaped silica sol in this embodiment consists of: 0.1g polyethylene glycol (molecular weight 5000-5500), 0.10g polyacrylamide (molecular weight 250000-250200), 20g silica sol raw material (average particle size 100nm, solid content is 50wt%) and the balance of deionized water.

[0062] The preparation process is the same as in Example 1, except that the control speed is 200rpm throughout the preparation process, and the silica sol raw material needs to be diluted 2 times before adding the silica sol raw material dropwise to the aqueous solution of polyethylene glycol in step 2). Then it was added dropwise to an aqueous solution of polyethylene glycol.

[0063] Use the water-soluble polymer-coated special-shaped silica sol in this embodiment as an abrasive to prepare a sapphire substrate polishing solution. The preparation process is as follows: Take 50 g of the above-mentioned water-s...

Embodiment 3

[0075] The weight percentage of the raw materials of the water-soluble polymer coated special-shaped silica sol in this embodiment consists of: 1g polypropylene glycol (molecular weight 19000-20000), 5g polyacrylamide (molecular weight 491000-500000), 20g silica sol raw material (average particle diameter 150nm, Solid content is 20wt%) and deionized water of balance.

[0076] The preparation process is the same as in Example 2, except that the silica sol raw material needs to be diluted 1 times before adding the silica sol raw material dropwise to the aqueous solution of polyethylene glycol in step 2), and then added dropwise to the polyethylene glycol solution. in aqueous solution.

[0077] Use the water-soluble polymer-coated special-shaped silica sol in this example as an abrasive to prepare a sapphire substrate polishing solution. The preparation process is as follows: Take 50 g of the above-mentioned water-soluble polymer-coated special-shaped silica sol, and mix it with ...

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Abstract

The invention relates to water-soluble polymer coated special-shaped silica sol, a preparation method and an application. The special-shaped silica sol is prepared from raw materials in percentage by weight as follows: 0.01wt%-1wt% of polyalcohol with molecular weight of 200-20,000, 0.01wt%-5wt% of water-soluble polymers with molecular weight of 10,000-500,000, 5wt%-50wt% of a silica sol raw material and the balance of deionized water. A physical structure of the special-shaped silica sol is irregularly special-shaped and is formed by the water-soluble polymers through coating. According to a polishing solution prepared from the silica sol, a protective film can be formed on the surface of a chip through addition of the water-soluble polymers including polyacrylamide, sodium polyacrylate and polyacrylic acid, microdefects of the surface of the chip in a polishing process are effectively reduced, so that the surface roughness of the chip is obviously reduced, and a relatively high polishing removal rate can be guaranteed.

Description

technical field [0001] The invention relates to the technical field of silica sol and sapphire substrate polishing, in particular to a water-soluble polymer-coated special-shaped silica sol, a preparation method and an application. Background technique [0002] Silica sol is a dispersion of nanoscale silicon dioxide in water or in a solvent. Due to the SiO in silica sol 2 Contains a lot of water and hydroxyl, so silica sol can also be expressed as SiO 2 .nH 2 O. There are different ways to prepare silica sol. The most commonly used methods are ion exchange method, silicon powder one-step hydrolysis method, silane hydrolysis method and so on. The ion exchange process of silica sol was developed by the NALCO company of the United States in the 1940s, and then perfected by the DuPont company of the United States in the 1950s and 1960s. It is currently the most mature and widely used process. This process has certain requirements on materials such as water glass and ion ex...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C09K3/14C08J5/14C09G1/02
CPCC08J5/00C09G1/02C09K3/1436
Inventor 何彦刚周建伟王如高宝红
Owner HEBEI UNIV OF TECH
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