Method for preparing force response photonic crystal material on basis of nano molding technique
A nano-molding technology and photonic crystal technology, applied in the field of preparation of photonic crystal materials, can solve the problems of difficulty in preparing nano-scale photonic crystals, limited precision of photonic crystals, poor structural controllability, etc. The effect of short preparation cycle and reduced preparation cost
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0049] The preparation method of the force-responsive photonic crystal material is as follows:
[0050] 1. If figure 1 As shown, the preparation steps of the quartz mother template are as follows:
[0051] (1) According to actual needs, pre-design the structural parameters of photonic crystals, mainly including: the surface structure is a hexagonal columnar lattice, the lattice period is 200nm, the diameter of the raised columns is 100nm, and the height of the raised columns is 150nm. The effective area is 20×20mm 2 .
[0052] (2) Take a piece of quartz substrate (size is 25mm×25mm), according to the structural parameters of the above photonic crystal, use electron beam lithography technology to expose the quartz substrate and the photoresist on it for 30s, and obtain a strip after development. A photoresist with a design pattern; then, use reactive ion etching technology to etch the quartz substrate and the photoresist on it for 20 minutes, in order to accurately transfer ...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com