A steel cylinder method for processing high-purity arsine

A pure arsine and steel cylinder technology, applied in the method of container discharge, gas treatment/storage purpose, fluid treatment, etc., can solve the problems of small output and no high-purity arsine steel cylinder treatment system, and achieve the effect of reducing emissions

Active Publication Date: 2018-02-23
SHANGHAI ZHENGFAN TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to technical reasons, my country can only produce arsine with a purity of about 3N-4N, and the output is very small, so there is no treatment system for high-purity arsine cylinders in China

Method used

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  • A steel cylinder method for processing high-purity arsine

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] A method for processing high-purity arsine cylinders:

[0023] Step 1: Use high-purity helium A to replace the entire main pipe 9 to ensure that the pipeline is not polluted, and then use the vacuum pump 4 to vacuum the main pipe 9;

[0024] Step 2: Set the temperature of the oven 3 at 60°C, and keep the vacuum pump 4 running, after the steel cylinder 2 to be treated is vacuum-baked for 8 hours, the steel cylinder 2 to be treated will always be kept at 60-100°C; Fill the cylinder 2 with helium until the pressure gauge 7 displays 1 bar, and then pump the helium gas through the vacuum pump 4 until the vacuum gauge 8 displays 0;

[0025] Step 3: Open the cylinder valve of the source gas cylinder 1, set the pressure of the pressure regulating valve 6 at 1 bar, fill the cylinder 2 to be treated with arsine gas until the pressure gauge 7 shows 0.1 bar, and pass the cylinder 2 to be treated with arsine Baking for 24 hours;

[0026] Step 4: Open the cylinder valve of the cold trap col...

Embodiment 2

[0030] A method for processing high-purity arsine cylinders:

[0031] Step 1: Use high-purity helium A to replace the entire main pipe 9 to ensure that the pipeline is not polluted, and then use the vacuum pump 4 to vacuum the main pipe 9;

[0032] Step 2: Set the temperature of the oven 3 at 100°C, and keep the vacuum pump 4 running, after the steel cylinder 2 to be treated is vacuum-baked for 4 hours, the steel cylinder 2 to be treated is always maintained at 60~100°C; Fill the cylinder 2 with helium until the pressure gauge 7 displays 1.5 bar, and then pump the helium gas through the vacuum pump 4 until the vacuum gauge 8 displays 0;

[0033] Step 3: Open the cylinder valve of the source gas cylinder 1, set the pressure of the pressure regulating valve 6 at 3 bar, fill the cylinder 2 to be treated with arsine gas until the pressure gauge 7 shows 0.5 bar, and pass the cylinder 2 to be treated with arsine Baking for 12 hours;

[0034] Step 4: Open the cylinder valve of the cold trap...

Embodiment 3

[0038] A method for processing high-purity arsine cylinders:

[0039] Step 1: Use high-purity helium A to replace the entire main pipe 9 to ensure that the pipeline is not polluted, and then use the vacuum pump 4 to vacuum the main pipe 9;

[0040] Step 2: Set the temperature of the oven 3 at 80°C, and keep the vacuum pump 4 running, after the steel cylinder 2 to be treated is vacuum-baked for 6 hours, the steel cylinder 2 to be treated is always maintained at 60-100°C; Fill the cylinder 2 with helium until the pressure gauge 7 displays 1.3 bar, and then pump the helium gas through the vacuum pump 4 until the vacuum gauge 8 displays 0;

[0041] Step 3: Open the cylinder valve of the source gas cylinder 1, set the pressure of the pressure regulating valve 6 to 2 bar, fill the cylinder 2 to be treated with arsine gas until the pressure gauge 7 shows 0.3 bar, and pass the cylinder 2 to be treated with arsine Baking for 18 hours;

[0042] Step 4: Open the cylinder valve of the cold trap ...

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Abstract

The invention discloses a method for processing steel bottles of high-purity arsine. The method includes the steps that valve outlets in the tops of the multiple to-be-processed steel bottles are connected to a main pipeline through steel bottle connectors; a valve outlet of a source gas steel bottle containing arsine and a valve outlet of a cold trap collection steel bottle are connected to the main pipeline through steel bottle connectors; replacement is conducted on the main pipeline through high-purity helium, it is ensured that the pipeline is not contaminated, and then the main pipeline is vacuumized through a vacuum pump; under the condition that the vacuum pump keeps running, vacuum baking is conducted on the to-be-processed steel bottles, helium is then injected into the to-be-processed steel bottles, and then the helium is pumped out through the vacuum pump; a steel bottle valve of the source gas steel bottle is opened, and arsine gas is injected into the to-be-processed steel bottles; helium is injected into the to-be-processed steel bottles, and then the helium is pumped out through the vacuum pump; and steel bottle valves of the to-be-processed steel bottles are closed, and the to-be-processed steel bottles are completely processed at the moment. According to the method, the arsine gas used for passivation is recycled, emission of the arsine-containing gas is well reduced, and the aim of cyclic economy is achieved.

Description

Technical field [0001] The invention relates to a method for processing high-purity arsine steel cylinders, and belongs to the technical field of electronic special gases. Background technique [0002] Arsine (AsH 3 ) Is a very important electronic gas. As an n-type dopant, it plays a key role in epitaxy and ion implantation processes. At the same time, arsine is also an important raw material for the synthesis of compound semiconductor gallium arsenide (GaAs) and gallium arsenide phosphorous (GaAsP). Compound semiconductors are widely used in the manufacture of light-emitting diodes (LEDs) and high-efficiency solar cells. [0003] Arsine (AsH 3 ) Synthesis cannot be achieved through simple elemental reactions, and is usually prepared by hydrolysis of metal arsenides. The yield depends on the nature of the metal elements in the arsenide and which decomposition agent is used. Usually the yield is between 14%-86%. [0004] At present, the purity of arsine used in the electronics in...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F17C7/00F17C13/02
CPCF17C7/00F17C13/025F17C2201/0119F17C2201/032F17C2201/056F17C2221/01F17C2223/0123F17C2225/0123F17C2227/0142F17C2250/0626F17C2260/044F17C2270/05
Inventor 汤剑波李东升
Owner SHANGHAI ZHENGFAN TECH
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