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Chromium-nitride-stabilized zirconium oxide vacuum coating material and manufacturing method thereof

A technology of stabilizing zirconia and vacuum coating, which is applied in vacuum evaporation coating, metal material coating process, sputtering coating, etc., can solve problems such as unstable refractive index and unevenness, and achieve the elimination of unevenness and increase Stability, effect of improving the laser damage threshold

Inactive Publication Date: 2016-03-02
WUXI HUIMING ELECTRONICS TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a chromium nitride-stabilized zirconia vacuum coating material and its preparation method, to solve the problems of instability and refractive index inhomogeneity in the coating process of traditional zirconia coating materials, and to improve the damage of zirconia films. threshold

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0016] After zirconia and chromium nitride are mixed uniformly in a molar ratio of 98%:2%, polyvinyl alcohol binder is added, the mixed powder is molded, pre-calcined, the pre-calcined temperature is 1200°C, and then vacuum sintered. The vacuum degree of vacuum sintering is 1×10 -4 Pa, the maximum sintering temperature is 1700°C, and the holding time is 120 minutes. After cooling down, a stable and dense chromium nitride-stabilized zirconia vacuum coating material is obtained. According to XRD analysis, a solid solution is formed, and zirconia exists in a tetragonal crystal form. A single-layer film is vapor-deposited on the BK7 glass substrate with chromium nitride-stabilized zirconia vacuum coating material, the refractive index is stable, and the beam current of the electron gun in the vacuum chamber is stable.

Embodiment 2

[0018] After zirconia and chromium nitride are mixed uniformly in a molar ratio of 98%:2%, polyvinyl alcohol binder is added, the mixed powder is molded, pre-calcined, the pre-calcined temperature is 1200°C, and then vacuum sintered. The vacuum degree of vacuum sintering is 1×10 -4 Pa, the maximum sintering temperature is 2200°C, and the holding time is 120 minutes. After cooling down, a stable and dense chromium nitride-stabilized zirconia vacuum coating material is obtained. According to XRD analysis, a solid solution is formed, and zirconia exists in a tetragonal crystal form. A single-layer film is vapor-deposited on the BK7 glass substrate with chromium nitride-stabilized zirconia vacuum coating material, the refractive index is stable, and the beam current of the electron gun in the vacuum chamber is stable.

Embodiment 3

[0020] After zirconia and chromium nitride are mixed evenly in a molar ratio of 98%:2%, polyvinyl alcohol binder is added, the mixed powder is molded, pre-calcined, the pre-calcined temperature is 1200°C, and then vacuum sintered. The vacuum degree of vacuum sintering is 1×10 -4 Pa, the maximum sintering temperature is 2000°C, and the holding time is 120 minutes. After cooling down, a stable and dense chromium nitride-stabilized zirconia vacuum coating material is obtained. According to XRD analysis, a solid solution is formed, and zirconia exists in a tetragonal crystal form. A single-layer film is vapor-deposited on the BK7 glass substrate with chromium nitride-stabilized zirconia vacuum coating material, the refractive index is stable, and the beam current of the electron gun in the vacuum chamber is stable.

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Abstract

The invention provides a chromium-nitride-stabilized zirconium oxide vacuum coating material and a manufacturing method thereof. Raw materials of the chromium-nitride-stabilized zirconium oxide vacuum coating material comprise, by mole, 75% to 98% of zirconium oxide and 2% to 25% of chromium nitride, and a proper amount of a polyvinyl alcohol bonding agent is added. The manufacturing method of the chromium-nitride-stabilized zirconium oxide vacuum coating material includes the following steps that firstly, zirconium oxide powder and chromium nitride powder serve as the raw materials, the raw materials are weighed according to the selected mole percents and evenly mixed, the polyvinyl alcohol bonding agent is then added, and the powder is agglomerated, pelletized and formed; secondly, the particle materials are pre-sintered, wherein the pre-sintering temperature is 1200 DEG C; and thirdly, the materials are sintered in a vacuum sintering furnace and then naturally cooled to the indoor temperature. By the adoption of the chromium-nitride-stabilized zirconium oxide vacuum coating material, the problems that a traditional zirconium oxide coating material is unstable and the refraction rate of the traditional zirconium oxide coating material is uneven in the coating process are solved, and the damage threshold value of a zirconium oxide film is increased.

Description

technical field [0001] The invention relates to a chromium nitride stabilized zirconia vacuum coating material and a preparation method thereof. Background technique [0002] Zirconium dioxide film has good thermal stability, chemical stability and mechanical properties. However, there is a polycrystalline transition in zirconia, which has a great influence on the properties of the film. ZrO 2 There are three main crystal forms, namely monoclinic, tetragonal and cubic. The monoclinic phase exists stably at room temperature. It transforms into a tetragonal phase when heated to 1170°C, and transforms into a cubic phase at 2370°C. The cubic phase is stable until the melting point of zirconia is 2680°C, and a reversible phase transition occurs when cooling. Because the transition between monoclinic and tetragonal crystal forms is accompanied by a 3%-5% volume change, which will destroy the zirconia material, so ZrO 2 The phase change of the thin film during the coating proce...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06
Inventor 袁萍
Owner WUXI HUIMING ELECTRONICS TECH
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