Focusing ion gun

Abstract

The invention discloses an ion gun structure used in an ion beam thinner for thinning a solid material. The ion gun comprises a first cathode, a shrinkage-pool-shaped anode and a second cathode, the voltage between the first cathode and the shrinkage-pool-shaped anode is controlled to be 0-2 KV, and the voltage between the shrinkage-pool-shaped anode and the second cathode is controlled to be 0-6 KV. One end of the first cathode is provided with a small hole via which argon enters the space between the first cathode and the shrinkage-pool-shaped anode, and argon is ionized under the electric field effect and forms a cation Ar<+>, and the cation enters the space between the shrinkage-pool-shaped anode and the second cathode. The center of the shrinkage-pool-shaped anode is provided with a hole with the hole size of 1 mm-2 mm, one surface of the hole is covered by an insulating layer, and the other surface is a shrinkage-pool-shaped metal surface. When argon ion subjected to preliminary ionization enters the shrinkage-pool-shaped anode, under the high-voltage electric field effect between the shrinkage-pool-shaped anode and the second cathode, Ar<+> is accelerated, forms a basically-parallel ion beam, rushes out of the ion gun, and thins a sample. The ion gun is good in focusing performance, and when a solid sample is thinned, the rising range of the sample temperature is small.

Description

technical field [0001] The invention belongs to the field of instruments for material science research, and more specifically relates to a focused ion gun. Background technique [0002] The development of material science is inseparable from advanced material sample preparation and analysis methods. The ion thinning instrument is a method that uses high-energy ion beams to mechanically impact the surface of materials to thin solid samples to a thickness of 2000 angstroms. Under the electron microscope (TEM), observe the microstructure inside the material and the composition of the material, so as to research and develop new materials. [0003] The ion gun is the key component of the ion thinner, and the focusing ability of the ion gun is one of the key factors to determine the performance of the ion thinner. The structure of a traditional ion gun is generally composed of positive and negative electrodes, and an electric field of 8kV to 10kV or even higher is applied between...

AI Technical Summary

Problems solved by technology

The higher the electric field voltage, the higher the ion beam speed, the stronger the thinning ability of the sample. However, when the electric field voltage exceeds 8kV, the temperature of the sample will easily rise when the ion thins the sample, which will cause the phase change of the material and affect the effect on the material. observation and analysis

The ionization voltage of the other half of the argon gas Ar is between 0-4kV. When the voltage exceeds 4kV, the ionization energy is too high due to the high ionization voltage, which is prone to unstable discharge phenomenon. A small amount of impurities are more prone to discharge under high voltage, resulting in the inability to generate a stable ion beam

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