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Laser biaxial differential confocal induction breakdown-Raman spectrum imaging detecting method and device

A dual-axis differential confocal, laser-induced breakdown technology, applied in Raman scattering, material excitation analysis, etc., can solve the problems that limit the improvement of spectral detection resolution, restrict the signal-to-noise ratio of the system, and insufficient spectral detection spatial resolution. It can improve the detection signal-to-noise ratio and spectral resolution, reduce spectral detection noise, and avoid system stray light.

Active Publication Date: 2015-09-23
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

[0005] 1) Due to the use of parallel laser beams to irradiate and excite samples to generate plasma, there are still problems such as large laser excitation spots and low spatial resolution of spectral detection;
[0006] 2) Parameters such as chemical bonds and molecular structures in the molecule cannot be detected, and the result restricts the accurate and complete acquisition of sample material component information;
[0007] 3) The backscattered light interference cannot be effectively suppressed, which restricts the improvement of the signal-to-noise ratio of the system, and further limits the improvement of the spectral detection resolution;
[0008] 3) The obtained sample component information cannot be combined with the sample morphology information, and in-situ high-resolution acquisition of sample morphology-component comprehensive information cannot be realized
[0010] Laser-induced breakdown spectroscopy focuses the intense pulsed laser on the sample surface to ionize the sample, which can excite the sample to generate plasma. The atomic and small molecular element composition information of the sample can be obtained by detecting the spectrum radiated by the energy decay of the plasma, but it cannot Obtaining the chemical bond and molecular structure information of the sample molecule, how to completely obtain the elemental composition and molecular structure information of the sample molecule is of great significance for high-precision analysis of the composition of the sample

Method used

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  • Laser biaxial differential confocal induction breakdown-Raman spectrum imaging detecting method and device
  • Laser biaxial differential confocal induction breakdown-Raman spectrum imaging detecting method and device
  • Laser biaxial differential confocal induction breakdown-Raman spectrum imaging detecting method and device

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Embodiment 1

[0056] In this embodiment, the light source 1 is a laser, the polarization modulation device 29 is a radially polarized light generator, the dichroic light splitting system 38 is a Notch filter, the data processing system 21 is a computer, and the first detector 22 is a first CCD detector , the Raman spectrum detector 35 is a spectrum CCD detector.

[0057] Such as image 3 , Figure 4 and Figure 7 As shown, the illumination objective lens 2 and the collection objective lens 7 are symmetrically distributed on both sides of the normal line 5 of the measurement surface, and the included angle between the illumination optical axis 4 and the normal line 5 of the measurement surface is θ 1 6. The angle between the collection optical axis 20 and the normal line 5 of the measurement surface is θ 2 37, where θ 1 = θ 2 , taking the 5 directions of the normal line of the measuring surface as the measuring axis, establishing a system coordinate system (x, y, z), a high spatial re...

Embodiment 2

[0075] In this embodiment, the polarization modulation system 29 is a radially polarized light generator, the dichroic spectroscopic system 38 is a Notch filter, the first detection system 11 is a first point detector, the second detection system 12 is a second point detector, and the data The processing system 21 is a computer, the first detector 22 is a first CCD detector, and the Raman spectrum detector 35 is a spectrum CCD detector.

[0076] Such as figure 2 , Figure 5 , Figure 6 and Figure 8 As shown, the embodiment 1 Figure 7 Replace the first CCD detector in the Figure 8 Two point detectors with the same parameters, namely the first point detector 11 and the second point detector 12, can constitute the second embodiment. The positions of the first point detector 11 and the second point detector 12 correspond to the positions of the first virtual pinhole 24 and the second virtual pinhole 23 in Embodiment 1, respectively. The positions of the first virtual pin...

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Abstract

The invention belongs to the technical field of spectral measurement and imaging and relates to a laser biaxial differential confocal induction breakdown-Raman spectrum imaging detecting method and device applicable to high-spatial-resolution imaging and detecting of sample microcell component and shape parameters. The method and device has the advantages that laser induction breakdown spectrum is used to detect the elementary composition information of sample components; Raman spectrum is used to detect the chemical bond and molecular structure information of the sample; the biaxial differential confocal technology is used to detect the surface shape information, a biaxial differential structure is large in visual field and large in working distance, accurate sample focus fixing can be achieved, smallest lighting spot is guaranteed, and spectrum excitation efficiency is increased; when the laser induction breakdown spectrum, the Raman spectrum and the biaxial differential confocal technology are used together, structure sharing and functional complementation can be achieved, and comprehensive measuring of sample shape and components is achieved; the method and device is high in spatial resolution, rich in substance component information, controllable in measuring focal spot, and the like, and the method and device is promising in the application prospect in fields such as mineral products, metallurgy, space exploration, environment monitoring and biological medical treatment.

Description

technical field [0001] The invention belongs to the field of spectral measurement and imaging technology, and relates to a laser dual-axis differential confocal induced breakdown-Raman spectral imaging detection method and device. The differential confocal imaging technology is combined with the spectral detection technology to form a The high-resolution spectral imaging and detection method and device of "map-spectrum integration" can be used for multi-spectral comprehensive testing and high-resolution imaging of micro-region morphological components of samples. technical background [0002] Laser Induced Breakdown Spectroscopy (LIBS for short) is an in-situ detection technology for material components, which uses high-power-density lasers to excite the sample surface to generate laser-induced plasma. The atomic and ion spectral lines in the sample can be used to determine the composition of the sample. Its outstanding advantage is that it can detect the composition of atom...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/65G01N21/63
CPCG01N21/718G01N21/65
Inventor 赵维谦王允邱丽荣
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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