Laser confocal induced breakdown-Raman spectral imaging detection method and device

Abstract

The invention belongs to the technical field of spectral measurement and imaging and relates to a laser confocal induced breakdown-Raman spectral imaging detection method and device. The method and device can be used for high spatial resolution imaging of micro-area ingredients of a sample and detection of morphological parameters of the sample. The method and device utilizes a laser confocal induced breakdown spectrum to detect sample ingredient elementary composition information, utilizes a Raman spectrum to detect sample chemical bond and molecular structure information, utilizes a confocal technology to detect sample surface morphology information, and utilizes axial focusing to guarantee the minimization of a light spot on the sample surface so that spectrum excitation efficiency is improved. Through combination of the above three technologies, structure and function complementation is realized and the graph-spectrum high spatial resolution spectral imaging detection method and device are constructed. The device has the advantages of high spatial resolution, abundant substance ingredient information and controllable measurement focusing light spot sizes and has a wide application prospect in the fields of mineral products, metallurgy, space exploration, environment monitoring and bio-medical treatment.

Description

technical field [0001] The invention belongs to the field of spectral measurement and imaging technology, and relates to a laser confocal induced breakdown-Raman spectral imaging detection method and device, which combines confocal imaging technology and spectral detection technology to form a "map-spectrum integration" The high-resolution spectral imaging and detection method and device can be used for multi-spectral comprehensive testing and high-resolution imaging of micro-region morphological components of samples. technical background [0002] Laser Induced Breakdown Spectroscopy (LIBS for short) is an in-situ detection technology for material components, which uses high-power-density lasers to excite the sample surface to generate laser-induced plasma. The atomic and ion spectral lines in the sample can be used to determine the composition of the sample. Its outstanding advantage is that it can detect the composition of atoms and small molecular elements. [0003] Sin...

AI Technical Summary

Problems solved by technology

[0005] 1) Due to the use of parallel laser beams to irradiate and excite samples to generate plasma, there are still problems such as large laser excitation spots and low spatial resolution of spectral detection;

[0006] 2) Parameters such as chemical bonds and molecular structures in the molecule cannot be detected, and the result restricts the accurate and complete acquisition of sample material component information;

[0007] 3) The obtained sample component information cannot be combined with the sample morphology information, and in-situ high-resolution acquisition of sample morphology-component comprehensive information cannot be realized

[0009] Laser-induced breakdown spectroscopy focuses the intense pulsed laser on the sample surface to ionize the sample, which can excite the sample to generate plasma. The atomic and small molecular element composition information of the sample can be obtained by detecting the spectrum radiated by the energy decay of the plasma, but it cannot Obtaining the chemical bond and molecular structure information of the sample molecule, how to completely obtain the elemental composition and molecular structure information of the sample molecule is of great significance for high-precision analysis of the composition of the sample

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