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Laser biax confocal induced breakdown-Raman spectrum imaging detection method and device

A laser-induced breakdown and Raman spectroscopy technology, applied in Raman scattering, material excitation analysis, etc., can solve problems such as limiting the improvement of spectral detection resolution, inability to detect chemical bonds, molecular structure, and restricting the system signal-to-noise ratio. Achieve the effect of improving the detection signal-to-noise ratio and spectral resolution, realizing structure sharing and functional complementarity, and reducing spectral detection noise

Active Publication Date: 2015-10-21
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

[0005] 1) Due to the use of parallel laser beams to irradiate and excite samples to generate plasma, there are still problems such as large laser excitation spots and low spatial resolution of spectral detection;
[0006] 2) Parameters such as chemical bonds and molecular structures in the molecule cannot be detected, and the result restricts the accurate and complete acquisition of sample material component information;
[0007] 3) The backscattered light interference cannot be effectively suppressed, which restricts the improvement of the signal-to-noise ratio of the system, and further limits the improvement of the spectral detection resolution;
[0008] 3) The obtained sample component information cannot be combined with the sample morphology information, and in-situ high-resolution acquisition of sample morphology-component comprehensive information cannot be realized
[0010] Laser-induced breakdown spectroscopy focuses the intense pulsed laser on the sample surface to ionize the sample, which can excite the sample to generate plasma. The atomic and small molecular element composition information of the sample can be obtained by detecting the spectrum radiated by the energy decay of the plasma, but it cannot Obtaining the chemical bond and molecular structure information of the sample molecule, how to completely obtain the elemental composition and molecular structure information of the sample molecule is of great significance for high-precision analysis of the composition of the sample

Method used

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  • Laser biax confocal induced breakdown-Raman spectrum imaging detection method and device
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  • Laser biax confocal induced breakdown-Raman spectrum imaging detection method and device

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Embodiment

[0053] In this embodiment, the light source 1 is a laser, the image magnification system 10 is a magnifying objective lens, the image acquisition system 11 is a CCD detector, the data processing system 21 is a computer, the detector 24 is a CCD detector, and the polarization modulation system 29 is a radial polarization The light generator, the dichroic light splitting system 32 is a Notch filter.

[0054] Such as figure 1 , figure 2 and Figure 5 As shown, the illumination objective lens 2 and the collection objective lens 7 are symmetrically distributed on both sides of the normal line 5 of the measurement surface, and the included angle between the illumination optical axis 4 and the normal line 5 of the measurement surface is θ 1 6. The angle between the collection optical axis 20 and the normal line 5 of the measurement surface is θ 2 31, where θ 1 = θ 2 , two-axis confocal laser-induced breakdown-Raman spectroscopy measurement method, the measurement steps are:

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Abstract

The invention belongs to the technical field of spectrum measurement and imaging and relates to a laser biax confocal induced breakdown-Raman spectrum imaging detection method and device. The method and device can be used for high spatial discrimination imaging and detection for microcell component and shape parameters of a sample. According to the method and device, elementary composition information of sample components is detected by utilizing the laser-induced breakdown spectrum; chemical bond and molecular structure information of the sample is detected by utilizing the Raman spectrum; surface appearance information of the sample is detected by utilizing the biax confocal technology. A biax structure has the advantages of being large in view field and working distance, the back scattering influence can be effectively restrained, and the spectrum detection signal-to-noise ratio is raised; the three elements are combined, the structural sharing and functional complementation can be achieved, and the comprehensive measurement about the appearance and component information of the sample can be achieved. The method and device have the advantages of being high in spatial discrimination, rich in material component information, controllable in measured focusing spot size and the like, and the wide prospect of application in fields such as mineral products, metallurgy, space exploration, environment monitoring, biology and medical treatment can be achieved.

Description

technical field [0001] The invention belongs to the technical field of spectral measurement and imaging, and relates to a laser biaxial confocal induced breakdown-Raman spectral imaging detection method and device, which combines laser confocal imaging technology with spectral detection technology to form a "spectrum combination" One" high-resolution spectral imaging and detection method and device, which can be used for multi-spectral comprehensive testing and high-resolution imaging of micro-region morphological components of samples. technical background [0002] Laser Induced Breakdown Spectroscopy (LIBS for short) is an in-situ detection technology for material components, which uses high-power-density lasers to excite the sample surface to generate laser-induced plasma. The atomic and ion spectral lines in the sample can be used to determine the composition of the sample. Its outstanding advantage is that it can detect the composition of atoms and small molecular eleme...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/65G01N21/63
Inventor 赵维谦王允邱丽荣
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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