Laser biax confocal induced breakdown-Raman spectrum imaging detection method and device
A laser-induced breakdown and Raman spectroscopy technology, applied in Raman scattering, material excitation analysis, etc., can solve problems such as limiting the improvement of spectral detection resolution, inability to detect chemical bonds, molecular structure, and restricting the system signal-to-noise ratio. Achieve the effect of improving the detection signal-to-noise ratio and spectral resolution, realizing structure sharing and functional complementarity, and reducing spectral detection noise
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[0053] In this embodiment, the light source 1 is a laser, the image magnification system 10 is a magnifying objective lens, the image acquisition system 11 is a CCD detector, the data processing system 21 is a computer, the detector 24 is a CCD detector, and the polarization modulation system 29 is a radial polarization The light generator, the dichroic light splitting system 32 is a Notch filter.
[0054] Such as figure 1 , figure 2 and Figure 5 As shown, the illumination objective lens 2 and the collection objective lens 7 are symmetrically distributed on both sides of the normal line 5 of the measurement surface, and the included angle between the illumination optical axis 4 and the normal line 5 of the measurement surface is θ 1 6. The angle between the collection optical axis 20 and the normal line 5 of the measurement surface is θ 2 31, where θ 1 = θ 2 , two-axis confocal laser-induced breakdown-Raman spectroscopy measurement method, the measurement steps are:
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