Laser differential confocal induced breakdown-Raman spectroscopy imaging detection method and laser differential confocal induced breakdown-Raman spectroscopy imaging detection apparatus

Abstract

The present invention belongs to the technical field of spectral measurement and imaging, and relates to a laser differential confocal induced breakdown spectroscopy-Raman spectroscopy imaging detection method and a laser differential confocal induced breakdown spectroscopy-Raman spectroscopy imaging detection apparatus, wherein the method and the apparatus can be used for high spatial resolution imaging and detection of micro-region components and morphological parameters of samples. According to the present invention, with the method and the apparatus, the laser induced breakdown spectroscopy is used to detect the element composition information of the sample component, the Raman spectroscopy is used to detect the chemical bonds and the molecular structure information of the sample, the differential confocal technology is used to detect the sample surface morphology information and precisely position the focus position to ensure the minimum excitation light spot so as to improve the spatial resolution of the spectral detection, and the three technology can be combined to achieve the structure sharing and the function complementing so as to form the image and spectrum integrated high spatial resolution spectral imaging detection method and the image and spectrum integrated high spatial resolution spectral imaging detection apparatus; and the method and the apparatus have advantages of high spatial resolution, rich material component information, controllable focusing light spot size measuring and the like, and have wide application prospects in the fields of mineral resources, metallurgy, space exploration, environmental monitoring, biomedicine and the like.

Description

technical field [0001] The invention belongs to the field of spectral measurement and imaging technology, and relates to a laser differential confocal induced breakdown-Raman spectral imaging detection method and device, which combines the differential confocal imaging technology with the spectral detection technology to form a "spectrum The "integration" high-resolution spectral imaging and detection method and device can be used for multi-spectral comprehensive testing and high-resolution imaging of micro-region morphological components of samples. technical background [0002] Laser-Induced Breakdown Spectroscopy (LIBS for short) is an in-situ detection technology for material components. and ion spectrum lines to determine the component structure of the sample, and its outstanding advantage is that it can detect the composition of atoms and small molecular elements. [0003] Since its birth in 1962, laser-induced breakdown spectroscopy has been widely used in many field...

AI Technical Summary

Problems solved by technology

[0005] 1) Due to the use of parallel laser beams to irradiate and excite samples to generate plasma, there are still problems such as large laser excitation spots and low spatial resolution of spectral detection;

[0006] 2) Parameters such as chemical bonds and molecular structures in the molecule cannot be detected, and the result restricts the accurate and complete acquisition of sample material component information;

[0007] 3) The obtained sample component information cannot be combined with the sample morphological information, and in-situ high-resolution imaging detection of comprehensive information on sample morphology-component cannot be realized

[0009] Laser-induced breakdown spectroscopy focuses the intense pulsed laser on the sample surface to ionize the sample, which can excite the sample to generate plasma. The atomic and small molecular element composition information of the sample can be obtained by detecting the spectrum radiated by the energy decay of the plasma, but it cannot Obtaining the chemical bond and molecular structure information of the sample molecule, how to completely obtain the elemental composition and molecular structure information of the sample molecule is of great significance for high-precision analysis of the composition of the sample

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