Surface discharge ceramic substrate for optical pumping source and preparation method thereof
A technology of surface discharge and ceramic substrate, which is applied in the field of functional materials and its preparation, can solve the problem that the anti-ablation performance cannot meet the requirements of substrate anti-discharge plasma ablation, the operating life of the surface photodischarge optical pump source is short, and the limitation of high power Repeated frequency XeF application and other issues to achieve the effect of easy nucleation and growth, optimization of process conditions and parameters, and small residual thermal stress
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0037] a kind of like figure 1 , figure 2 and Figure 4 The alumina surface discharge ceramic substrate used for the optical pumping source of the present invention is shown, and the surface discharge ceramic substrate is a double-layer stacked structure, including an alumina ceramic body 2 (wherein α-Al 2 o 3 The content is 95%) and the diamond ablation-resistant coating 1 (diamond continuous film) deposited on the alumina ceramic body 2. In this embodiment, the thickness of the diamond ablation-resistant coating 1 is 40.0 μm, and the surface resistance is 1.5×10 12 Ω·cm.
[0038] The preparation method of the surface discharge ceramic substrate in this embodiment comprises the following steps:
[0039] (1) select the coarse-grained diamond powder that particle diameter is 4.0 μ m for use, the fine-grained diamond powder that particle diameter is 0.8 μ m, acetone, coarse-grained diamond powder, fine-grained diamond powder, magnesium carbonate are 75% by mass ratio : 10...
Embodiment 2
[0045] a kind of like image 3 , Figure 4 The surface discharge ceramic substrate of beryllium oxide used for optical pumping source of the present invention is shown, the surface discharge ceramic substrate is a double-layer stacked structure, including a beryllium oxide ceramic body 2 and ablation-resistant diamond deposited on the beryllium oxide ceramic body 2 Coating 1 (diamond continuous film). In this embodiment, the thickness of the diamond ablation-resistant coating 1 is 80.0 μm, and the surface resistance is 7.2×10 12 Ω·cm.
[0046] The preparation method of the surface discharge ceramic substrate in this embodiment comprises the following steps:
[0047] (1) select the coarse-grained diamond powder that particle diameter is 1.0 μ m for use, the fine-grained diamond powder that particle diameter is 0.1 μ m, acetone, coarse-grained diamond powder, fine-grained diamond powder, magnesium carbonate are 85 by mass ratio : 6: 12: 2 are fully mixed and evenly prepared ...
Embodiment 3
[0053] a kind of like Figure 4 The alumina surface discharge ceramic substrate used for the optical pumping source of the present invention is shown, and the surface discharge ceramic substrate is a double-layer stacked structure, including an alumina ceramic body 2 (wherein α-Al 2 o 3 The content is 99%) and the diamond ablation-resistant coating 1 (diamond continuous film) deposited on the alumina ceramic body 2. In this embodiment, the thickness of the diamond ablation-resistant coating 1 is 100.0 μm, and the surface resistance is 9.0×10 12 Ω·cm.
[0054] The preparation method of the surface discharge ceramic substrate in this embodiment comprises the following steps:
[0055] (1) select particle diameter to be the coarse-grained diamond powder of 5.0 μ m, the fine-grained diamond powder of 0.6 μ m in particle diameter, acetone, coarse-grained diamond powder, fine-grained diamond powder, magnesium carbonate are 80% by mass ratio : 5: 14: 1 and fully mixed to obtain di...
PUM
Property | Measurement | Unit |
---|---|---|
thickness | aaaaa | aaaaa |
particle diameter | aaaaa | aaaaa |
particle diameter | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com