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New method for preparing diamond coated cutting tool

A technology of diamond coating and a new method, which is applied in the direction of metal material coating process, coating, gaseous chemical plating, etc., to achieve the effect of prolonging the deposition time, inhibiting the growth of grains, and good repeatability

Inactive Publication Date: 2014-12-24
JIANGSU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to overcome the defects of the above method and solve the influence of cobalt on the tool surface on the tool, the present invention proposes a new method for depositing high-quality diamond-coated tools. A layer of molybdenum is coated by physical vapor deposition, which will combine with cobalt on the surface of the substrate to form a stable compound, forming a transition layer on the surface of the substrate, which will not only reduce the impact of cobalt on the surface of the tool on the diamond coating in the future, but also prevent cobalt from Diffusion from the depth of the substrate to the surface of the tool; then a layer of diamond coating is formed in two steps by microwave plasma CVD (MPCVD), that is, the corresponding parameters are controlled in the two stages of diamond nucleation and growth to form a layer with high quality and highly stable nano-diamond film

Method used

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  • New method for preparing diamond coated cutting tool
  • New method for preparing diamond coated cutting tool

Examples

Experimental program
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Effect test

Embodiment 1

[0028] 1. First, ultrasonically clean the surface of the YG series cemented carbide tool to remove impurities and oil stains on the surface of the tool.

[0029] 2. Electroplate or physically vapor deposit a layer of molybdenum on the surface of the cleaned cemented carbide tool. After completion, clean the transition layer with acetone or alcohol to prepare for the deposition of diamond coating.

[0030] 3. On the quartz bell-jar type MPCVD equipment, put the coated carbide tool on the substrate support table in the reaction chamber. In the diamond nucleation stage, the microwave power is 950W, and the concentration of methane is 1.5%. 2 The flow rate is 90sccm, the substrate temperature is 650°C, the air pressure is 7.5KPa, and the deposition time is 15min.

[0031] 4. In the diamond growth stage, the deposition of the diamond film is completed in two steps. Put the cemented carbide tool into the 0.4~0.8μm diamond powder solution, the first step, reduce the concentration of...

Embodiment 2

[0034] 1. First, ultrasonically clean the surface of the YG series cemented carbide tool to remove impurities and oil stains on the surface of the tool.

[0035] 2. Electroplate or physically vapor deposit a layer of molybdenum on the surface of the cleaned cemented carbide tool. After completion, clean the transition layer with acetone or alcohol to prepare for the deposition of diamond coating.

[0036] 3. On the quartz bell-jar type MPCVD equipment, put the coated carbide tool on the substrate support table in the reaction chamber. In the diamond nucleation stage, the microwave power is 1000W, and the concentration of methane is 1.5%. H 2 The flow rate is 110sccm, the substrate temperature is 700°C, the air pressure is 8KPa, and the deposition time is 15min.

[0037] 4. In the diamond growth stage, the deposition of the diamond film is completed in two steps. Put the cemented carbide tool into the 0.4~0.8μm diamond powder solution. In the first step, reduce the concentrati...

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Abstract

The invention belongs to the field of a material coating, and particularly provides a new method for preparing a high-quality diamond coated cutting tool by multilayered step-by-step deposition. The new method concretely comprises the following steps: firstly, plating a molybdenum layer on the surface of a hard alloy cutting tool by adopting an electroplating method or a physical vapor deposition method, wherein molybdenum is bound together with cobalt on the surface of a matrix to form a stable compound so as to form a transition layer on the surface of the matrix, so that not only can the influence of cobalt on the surface of the cutting tool to the diamond coating be reduced, but also the dispersion of cobalt towards the surface of the cutting tool from the depth position of the matrix is prevented; and then depositing a diamond coating by two steps through utilizing microwave plasma CVD (MPCVD) method, namely controlling corresponding parameters in diamond nucleation and growth stages to form a nanodiamond thin film with high quality and high stability.

Description

technical field [0001] The invention belongs to the field of material coatings, and in particular relates to a new method for step-by-step deposition of multilayer diamond coating tools. Background technique [0002] With the rapid development of the automobile, aviation and aerospace industries, the requirements for light weight and high specific strength of materials are increasing day by day. Materials are more and more widely used in industry, and the defects of ordinary high-speed steel and carbide tools are obviously exposed when machining these materials. Diamond has many excellent properties, such as ultra-high hardness, high thermal conductivity, high optical transmittance and excellent electrical insulation. It is an ideal material for making knives that is incomparable among known materials. Because natural diamond resources are extremely limited and expensive, they cannot be used on a large scale in industry. Therefore, the technology of coating the surface of c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/27C23C16/511
Inventor 陈希章于杰
Owner JIANGSU UNIV
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