A microscopic imaging system for analysis of integrated light interference and scattering information and a method
A technology of scattering information and microscopic imaging, which is applied in the direction of optical devices, measuring devices, and phase influence characteristic measurement, can solve the problems of reducing spatial phase sensitivity, difficulty in substructure detection, and large scattering influence, and achieves strong application value , improve stability, improve the effect of resolution
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[0023] The technical solution of the present invention will be described in further detail below in conjunction with the accompanying drawings.
[0024] The microscopic imaging system integrating optical interference and scattering information analysis of the present invention is realized by a coaxial Michelson optical path and a Millau interferometer, such as figure 1 shown.
[0025]The light beam emitted by the light source 1 is transmitted forward through the beam shaping system composed of the first lens 2, the field stop 3, the second lens 4 and the aperture stop 5, and reaches the first beam splitter 6, and the first beam splitter The reflected light of 6 is transmitted to the second mirror 9 through the third lens 7, and the light beam is divided into two parts by the second beam splitter 9, one part is reflected on the mirror 8, and the other part is transmitted to the sample: part of the light transmitted to the sample is generated Reflection, this part of the r...
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