Preparation method of twist angle-controllable multilayer graphene structure
A multi-layer graphene, twist angle technology, applied in the field of materials, can solve problems such as the inability to precisely control the twist angle of graphene layers and layers
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[0023] In SiO 2 / Si substrate to prepare a double-layer graphene structure with controllable twist angle, comprising the following steps:
[0024] (1) Using the method of mechanical exfoliation on Si / SiO 2 Prepare a single layer of graphene on the substrate, and use a microscope to find the target graphene, the substrate SiO 2 The layer thickness is 285nm;
[0025] (2) Under the microscope, use 800nm femtosecond laser to cut the target graphene into two parts, ensure that the edges of the cut graphene are parallel to each other, the objective lens is 100X, the femtosecond laser power is 50mW, and the scanning speed is 5μm / s;
[0026] (3) Spin-coat a layer of PMMA film on the sample, the target graphene is attached on the PMMA layer, the concentration of PMMA / chloroform solution is 0.075mg / ml, the spin-coating speed is 3000rpm, and the time is 30s;
[0027] (4) Use 800nm femtosecond laser under the microscope to cut the PMMA / photoresist layer into two parts in the direct...
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