Graphene medium-far infrared detector and preparing method thereof

Abstract

The invention discloses a graphene medium-far infrared detector and a preparing method thereof. The infrared detector comprises a layer of graphene film of which the basic unit is a graphene infrared photoelectric transistor using a colloid quantum dot layer as an optical control top gate. The graphene medium-far infrared probe overcomes the problems of lower absorption rate of graphene to light, and the electricity adjustability of graphene channels is kept, so the graphene medium-far infrared detector can be both optically and electrically bias-controlled. The transistor has ultrahigh infrared absorption rate, inner quantum efficiency, gain and very low noise level and different colloid quantum dot layer materials can be selected according to the difference of detected infrared wavelength ranges. The graphene medium-far infrared detector is easily compatible with the existing silica-based CMOS (complementary metal-oxide-semiconductor transistor) integrated circuit technology, and can realize the large-scale sensor array production with low cost. The successful preparation of the graphene medium-far infrared detector lays a basis for the research on high-performance graphene-based infrared focal plane array sensors.

Description

Technical field: [0001] The invention relates to a structural design and a manufacturing process of an infrared detector, in particular to a structural design and a manufacturing process of a graphene mid-to-far infrared detector. Background technique: [0002] Infrared radiation contains rich objective information, and its detection has attracted much attention. After 70 years of development, infrared detectors have covered short-wave, medium-wave and long-wave ranges, and have been widely used in military and civilian fields. At present, the key technologies of high-performance infrared focal plane array sensors based on pyroelectric, semiconductor quantum wells and quantum dots are mainly mastered by countries such as Europe, America and Japan, forcing domestic research institutions to tackle key problems and catch up with or even surpass existing technologies. [0003] Graphene is a two-dimensional crystal composed of a single layer of carbon atoms. It has excellent mec...

AI Technical Summary

Problems solved by technology

However, graphene can only absorb about 2.3% of the incident light. Although it is already a high absorption rate for a one-way material, it is far from enough for practical light detection.

Of course, if multiple layers of graphene are stacked together, the absorption rate can be effectively improved, but this will inevitably affect the transport characteristics and gate electric field tunable characteristics of graphene.

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