Piezoelectric and triboelectric coupling-based flexible micro energy harvester and preparation method

Abstract

The invention discloses a piezoelectric and triboelectric coupling-based flexible micro energy harvester. The energy harvester comprises a piezoelectric layer, first electrode layers, second electrode layers, friction layers and substrate layers, wherein the first electrode layers, the friction layers, the second electrode layers and the substrate layers are arranged on the upper and lower sides of the piezoelectric layer from inside to outside in sequence; the friction layers comprise bumps with micron-scale structures. The invention also provides a corresponding preparation method. Each metal electrode layer and each metal compound layer are obtained from flexible piezoelectric materials such as PVDF (Polyvinylidene Fluoride) obtained through a spin coating, deposition or electrostatic spinning process by using processes such as sputtering, spin coating and evaporation, the flexible polymer bump static friction layer is prepared by using a molding method, meanwhile, a flexible substrate polymer is adopted and a piezoelectric and triboelectric principle is combined to manufacture the micro energy harvester of a hamburger structure stacked by central piezoelectric layers. The device has the characteristics of simple structure, easiness in implementation of micro machining, variable size, wide frequency band, high conversion efficiency and the like.

Description

technical field [0001] The invention relates to a device in the field of energy technology, and more specifically, relates to a piezoelectric and triboelectric coupling flexible miniature energy harvester and a preparation method thereof. Background technique [0002] In recent years, with the rapid development of micromachining technology and wireless sensing technology, new requirements and challenges have been put forward for the performance and application range of micro energy harvesters. The micro-vibration energy harvester based on static electricity and piezoelectricity, as a new type of self-powered micro-energy device, can convert the deformation of the energy harvester in the environment into electrical energy through the piezoelectric effect, and at the same time use friction to generate energy. Triboelectricity is generated by the principle of electricity and electrostatic induction, which is provided to microelectronic devices, and has received more and more ex...

AI Technical Summary

Problems solved by technology

[0003] At present, most of the piezoelectric energy harvesters prepared by MEMS technology are rigid structures, and the collected vibration frequency is relatively high.

At the same time, the current miniature electrostatic energy harvester adopts silicon-based technology, which requires large-scale equipment and special processes, and the processing cost is too high, which is not conducive to the commercialization of energy harvesters.

Most of the piezoelectric materials used in flexible piezoelectric energy harvesters are PVDF and its binary polymers. The dielectric elastic coefficient is not as high as that of rigid piezoelectric materials such as PZT, which significantly reduces the resonance frequency of energy harvesters.

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