Terahertz front-end integrated receiving device based on bulk silicon MEMS (micro-electromechanical system) technical antenna
A technology of a receiving device and an antenna, applied in the field of terahertz technology, can solve the problems of insufficient integration, difficult processing, large volume, etc., and achieve the effects of strong achievability, easy processing and manufacturing, and small volume
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[0026] Terahertz front-end integrated receiving device based on bulk silicon MEMS antenna, mainly including antenna and mixer chip, base and backplane; antenna is H-plane horn antenna and planar ALTSA antenna uses WR1.9 waveguide (483um×241um) Or WR2.2 (559um×279um) VDI standard waveguide, which is bonded by two silicon wafers with a thickness of 400um.
[0027] The mixer chip is a superheterodyne detector, including a room temperature Schottky diode mixer, a superconducting tunnel junction mixer, and a thermal electron thermal resistance mixer; the external part of the base is reserved for chips, intermediate frequency terminals, etc. The physical matching position; the backplane also reserves space for physical matching with chips, intermediate frequency terminals, etc.;
[0028] Connection relationship:
[0029] The mixer chip is fixed at the end of the antenna waveguide through the connection hole between the mixer and the waveguide;
[0030] The backplane is a rectangul...
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