Device and method for producing large-size quartz glass by using composite induction-resistance melting induction smelting method

Abstract

The invention provides a device and a method for producing large-size quartz glass by using a composite induction-resistance melting induction smelting method. The device comprises a raw material chamber, a hydrogen storage kettle, a rotary cylinder, a vacuum pump, a smelting chamber, a smelting furnace body, a smelting furnace cover and a material distributor of a material distribution chamber, which are connected with each other to form the device. The large-size quartz glass is prepared by processing highly pure quartz materials of 300 meshes with the purity higher than 99.9% by the device; a resistance-induction composite heating way is adopted; and the quartz flux is electromagnetically stirred by the induction heating, so that air bubbles are decreased and the yield is higher than 90%. The shape and size of glass ingots are determined according to the size of an induction crucible; the glass ingots are quartz glass ingots with the maximum diameter of 2000mm, which breaks through a limit that a method of producing the glass ingots by using a continuous smelting method has difficulty in producing the quartz glass ingots with the diameter larger than 500mm; the investment cost is less than 10% of that of the continuous smelting method; and the method has market flexibility of quantitative production.

Description

technical field [0001] The invention relates to an induction / resistance compound melting induction smelting method for producing large-sized quartz glass equipment and a method. Background technique [0002] Quartz glass is a special industrial technical glass with a single component of silica. It has extremely good light transmission performance, and has extremely high transmittance in the ultraviolet, visible, and infrared bands; its high temperature resistance is very good, and it is Transparent refractory material, the service temperature is as high as 1100°C, which is 700°C higher than ordinary glass. Its expansion coefficient is extremely low, equivalent to one-twentieth of ordinary glass, and its thermal stability is particularly good. Therefore, it has been widely used in high-tech fields such as new electric light source, semiconductor integrated circuit, laser technology and aerospace. [0003] The manufacturing process of quartz glass is very special, which is c...

AI Technical Summary

Problems solved by technology

First, the melting temperature is high, the viscosity is high, and the bubbles are difficult to get rid of

The second difficulty is that quartz glass with excellent performance must be of high purity, and the total amount of impurities is less than one ten-thousandth. There are only two materials for melting quartz glass: high-purity tungsten and high-purity graphite.

The Φ500mm quartz glass ingot can be produced by continuous melting method, but the production technology of larger size quartz glass ingot is more difficult

[0006]In addition, the equipment for producing quartz glass by the continuous melting method is complicated and the investment is high, which is not conducive to the company's mass production according to market changes

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