Manufacturing method of semiconductor device
A manufacturing method and semiconductor technology, applied in the fields of semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems affecting the performance of semiconductor devices, inaccurate dimensions, etc., and achieve the effect of accurate feature size and avoidance of influence.
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[0038] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0039] In the following description, many specific details are set forth in order to fully understand the present invention, but the present invention can also be implemented in other ways than those described here, so the present invention is not limited by the specific embodiments disclosed below.
[0040] As mentioned in the background section, the size of the semiconductor device formed by the above-mentioned prior art has the problem of inaccurate size, that is, the actual size of the formed semiconductor device may be larger than the designed size, thereby affecting the performance of the semiconductor device.
[0041] The inventor finds after analysis that the reason for the above-mentioned problems is that using the prior art, t...
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