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Method for preparing concave lens array structure on titanium dioxide inorganic-organic photosensitive composite film

An array structure and titanium dioxide technology, which is applied in the field of preparation of concave lens array structures, can solve problems such as errors, and achieve the effects of large hardness, adjustable refractive index and high optical transmittance

Inactive Publication Date: 2012-11-28
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The above-mentioned processing technology of various microlens array structures generally needs to transfer the prepared microlens array structure to the target material or the substrate through etching and other methods, so that after multiple pattern transfers, it will bring large error

Method used

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  • Method for preparing concave lens array structure on titanium dioxide inorganic-organic photosensitive composite film
  • Method for preparing concave lens array structure on titanium dioxide inorganic-organic photosensitive composite film
  • Method for preparing concave lens array structure on titanium dioxide inorganic-organic photosensitive composite film

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Experimental program
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Effect test

Embodiment 1

[0020] 1) First, use a JKG-2A photolithography machine to expose the AZ5214-E photoresist for 60 seconds through a circular array mask, and then develop it in an AZ-Developer developer for 60 seconds to obtain a cylindrical array structure. , and then reflow the obtained cylinder array structure on a hot plate at 160° C. for 30 minutes to obtain a photoresist master with a diameter of 20 μm and an interval of 20 μm convex lens array structure;

[0021] 2) Mix the PDMS prepolymer and curing agent of Sylgard184 at a weight ratio of 10:1 and put it in a vacuum drying oven until the air bubbles are completely removed. The photoresist master was cured in a 90°C oven for 30 minutes, and finally the fully cured PDMS was peeled off from the photoresist master with a convex lens array structure to obtain a PDMS soft template with a concave lens array structure;

[0022] 3) The mixture of PDMS prepolymer and curing agent whose air bubbles have been removed in 2) is poured onto the PDMS ...

Embodiment 2

[0025] Steps 1), 2), and 3) of this embodiment are the same as those of Embodiment 1;

[0026] 4) Using the spin-coating process, a titanium dioxide organic-inorganic composite film with UV photosensitive properties was prepared on a glass slide at a speed of 1000 rpm from the photosensitive composite base solution, and used as an embossing layer to incorporate a convex lens array structure The PDMS soft template was imprinted onto the composite film at a pressure of 2MPa for a duration of 20 minutes, and then placed directly under a UV lamp (wavelength 365nm, current 15mW / cm 2 ) was exposed and cured, and finally the fully cured photosensitive composite film was peeled off from the PDMS soft template with a convex lens array structure, and dried in an oven, thereby preparing a concave lens array structure on the titanium dioxide organic-inorganic photosensitive composite film. Among them, the depth of the concave lens array is 3.2 μm, the diameter of the concave lens is 20 μm...

Embodiment 3

[0028] Steps 1), 2), and 3) of this embodiment are the same as those of Embodiment 1;

[0029] 4) Using the spin-coating process, a titanium dioxide organic-inorganic composite film with UV photosensitive properties was prepared on a glass slide at a speed of 1000 rpm from the photosensitive composite base solution, and used as an embossing layer to incorporate a convex lens array structure The PDMS soft template was imprinted onto the composite film at a pressure of 3 MPa for 10 minutes, and then placed directly under a UV lamp (wavelength 365 nm, current 15 mW / cm 2 ) was exposed and cured, and finally the fully cured photosensitive composite film was peeled off from the PDMS soft template with a convex lens array structure, and dried in an oven, thereby preparing a concave lens array structure on the titanium dioxide organic-inorganic photosensitive composite film. The depth of the concave lens array is 3.6 μm, the diameter of the concave lens is 20 μm, and the surface of th...

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Abstract

The invention relates to a method for preparing a concave lens array structure on a titanium dioxide inorganic-organic photosensitive composite film, comprising the following steps: preparing a mother board in a micro-convex array structure by combining an optical lithography technology with a photoresist thermal reflux method, a PDMS soft mold in a concave array structure by reproducing the mother board, a PDMS soft mold in a convex array structure by secondarily reproducing the PDMS soft mold as the mother board, finally preparing the concave lens array structure on the titanium dioxide inorganic-organic photosensitive composite film using an ultraviolet soft-pressing lithography technology. The dimension of the finally prepared concave lens array structure is adjusted by the dimension of the picture of the mother board, and the basic optical parameters of the concave lens array structure can be realized by adjusting the refractive index of the photosensitive composite material, and especially the method is an effective method for preparing the concave lens array structure, which is quick in production, low in cost, high in precision and capable of producing the concave lens array structure in batch.

Description

technical field [0001] The invention relates to a method for preparing a concave lens array structure, in particular to a method for preparing a concave lens array structure on a titanium dioxide organic-inorganic photosensitive composite film. Background technique [0002] The microlens array structure is an important integrated optical component, which plays an important role in the field of optical interconnection and optical communication. At present, there are many methods for preparing the microlens array structure, including laser direct writing technology, thermal reflow method of photoresist, gray scale mask technology and so on. However, these currently known preparation techniques have complicated process, expensive equipment, long processing cycle, and cannot realize mass production, and the prepared microlens structure generally has relatively large surface roughness. Moreover, most of these processing techniques are used to prepare micro-convex lens array stru...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/00G03F7/20G02B3/00
Inventor 阙文修张雪花
Owner XI AN JIAOTONG UNIV
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