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Preparation method of film temperature sensor for liquid floated gyroscope

A thin-film temperature and liquid floating gyroscope technology, which is applied in the direction of instruments, thermometers, scientific instruments, etc., can solve the problems of difficult substrate processing, gyroscope measurement, no related reports, and low mechanical strength, so as to achieve solid structure and good film-base bonding force , the effect of short response time

Inactive Publication Date: 2012-07-25
HARBIN ENG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, these thin-film temperature sensors have the disadvantages of difficult substrate processing, difficulty in measuring the entire working surface of the gyroscope, complicated process, and low mechanical strength.
[0004] Aluminum alloy can form a dense oxide film through micro-arc oxidation, and its dielectric strength can meet the dielectric isolation performance requirements of thin-film temperature sensors. However, there is no relevant report on using aluminum alloy as the temperature sensor substrate and preparing a dielectric isolation layer by micro-arc oxidation.

Method used

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  • Preparation method of film temperature sensor for liquid floated gyroscope
  • Preparation method of film temperature sensor for liquid floated gyroscope
  • Preparation method of film temperature sensor for liquid floated gyroscope

Examples

Experimental program
Comparison scheme
Effect test

specific Embodiment approach 1

[0022] (1) Using 7075 aluminum alloy as raw material, cut it into a ring with an outer diameter of 50mm, an inner diameter of 42mm, and a thickness of 1.5mm; the chemical composition of the 7075 aluminum alloy sample is as follows:

[0023]

[0024] (2) The aluminum alloy rings are gradually polished with 2000# and 3000# sandpaper, followed by degreasing in acetone and absolute ethanol, washing with alkali, pickling, washing with deionized water, and drying. Among them, alkaline washing solution: NaOH (30g / L), Na 2 CO 3 (20g / L), pickling solution: HNO 3 (12ml / L).

[0025] (3) Using MAO 60H-11 micro-arc oxidation power supply, in KOH and Na 2 SiO 3 The micro-arc oxidation process is carried out in the mixed electrolyte, where the frequency f=600Hz, the duty ratio Φ=8%, the temperature of the electrolyte during the reaction process is maintained below 40°C, the experimental voltage is set as shown in the table below, and the reaction time is 10min to obtain Al-based al ...

specific Embodiment approach 2

[0035] (1) Using 2024 aluminum alloy as raw material, cut it into a ring with an outer diameter of 50mm, an inner diameter of 42mm, and a thickness of 1.5mm; the chemical composition of the 2024 aluminum alloy sample is as follows:

[0036]

[0037]

[0038] (2) The aluminum alloy rings are gradually polished with 2000# and 3000# sandpaper, followed by degreasing in acetone and absolute ethanol, washing with alkali, pickling, washing with deionized water, and drying. Among them, alkaline washing solution: NaOH (30g / L), Na 2 CO 3 (20g / L), pickling solution: HNO 3 (12ml / L).

[0039] (3) Using MAO 60H-11 micro-arc oxidation power supply, in KOH and Na 2 SiO 3 The micro-arc oxidation process is carried out in the mixed electrolyte, where the frequency f = 600Hz, the duty cycle Φ = 8%, the temperature of the electrolyte during the reaction process is maintained below 40°C, the experimental voltage is set as shown in the table below, and the reaction time is 15min. Al 2 ...

specific Embodiment approach 3

[0047] (1) Using 2024 aluminum alloy as raw material, cut it into a ring with an outer diameter of 50mm, an inner diameter of 42mm, and a thickness of 1.5mm; the chemical composition of the 2024 aluminum alloy sample is as follows:

[0048]

[0049] (2) The aluminum alloy rings are gradually polished with 2000# and 3000# sandpaper, followed by degreasing in acetone and absolute ethanol, washing with alkali, pickling, washing with deionized water, and drying. Among them, alkaline washing solution: NaOH (30g / L), Na 2 CO 3 (20g / L), pickling solution: HNO 3 (12ml / L).

[0050] (3) Using MAO 60H-11 micro-arc oxidation power supply, in KOH and Na 2 SiO 3 The micro-arc oxidation process is carried out in the mixed electrolyte, where the frequency f = 600Hz, the duty cycle Φ = 8%, the temperature of the electrolyte during the reaction process is maintained below 40°C, the experimental voltage is set as shown in the table below, and the reaction time is 15min. Al 2 o 3 Membran...

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Abstract

The invention provides a preparation method of a film temperature sensor for a liquid floated gyroscope. The preparation method comprises the following steps of: machining an aluminums alloy circular ring; drying after carrying out mechanical polishing, oil removing, alkali washing, acid washing and de-ionized water cleaning; carrying out micro-arc oxidation in a mixed electrolyte of KOH and Na2SiO3 by using a micro-arc oxidation method, so as to obtain an Al-based Al2O3 test piece; mechanically polishing and ultrasonically cleaning the test piece in alcohol; preparing a Cu film by using a physical deposition method, so as to obtain an Al-based Al2O3 / Cu film test piece; carrying out thermal treatment in a vacuum condition; etching to obtain a copper wire strip with an assigned resistance value, the width of 20-100 microns and flat edges; welding a lead wire by using a thick film welding technology; and packaging by using silicon rubber so as to form an Al-Al2O3-Cu-Al2O3-Al film temperature sensor. The preparation method provided by the invention prepares the film temperature sensor for the liquid floated gyroscope with the characteristics of resistance of soaking fluorocarbon oil and bromine oil, miniaturization, integration, short response time and firm structure through key steps, such as a preparation technology of a high-insulating compact medium isolating layer, a controllable generation technology of a plasma closed field temperature sensitive Cu film, and a resistance strip etching technology. The preparation method of the aluminum base film temperature sensor formed by the preparation method provided by the invention can be applied to manufacturing other temperature sensitive elements.

Description

technical field [0001] The invention relates to a method for preparing a thin film temperature sensor, in particular to a method for directly forming a thin film temperature sensor for a liquid floating gyro on an aluminum substrate. Background technique [0002] At present, the temperature measurement of the liquid floating gyroscope is realized by using the thermistor and temperature measuring resistor installed in the gyroscope. The traditional process uses high-purity platinum wire or copper wire to be evenly wound on the outer peripheral insulating frame of the gyroscope. After the traditional temperature sensor has been used for a long time, the organic insulating framework and the outer insulating layer of the metal wire will dissolve in the fluorobromine oil suspension, contaminating the suspension, causing the suspension to be drawn, and seriously affecting the accuracy and reliability of the gyroscope. [0003] Thin film temperature sensor is a new type of sensor d...

Claims

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Application Information

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IPC IPC(8): G01K7/22
Inventor 乔英杰崔新芳张晓红
Owner HARBIN ENG UNIV
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